JPS6350876U - - Google Patents
Info
- Publication number
- JPS6350876U JPS6350876U JP14500286U JP14500286U JPS6350876U JP S6350876 U JPS6350876 U JP S6350876U JP 14500286 U JP14500286 U JP 14500286U JP 14500286 U JP14500286 U JP 14500286U JP S6350876 U JPS6350876 U JP S6350876U
- Authority
- JP
- Japan
- Prior art keywords
- transmanipulator
- susceptor
- vacuum
- rod
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14500286U JPS6350876U (en, 2012) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14500286U JPS6350876U (en, 2012) | 1986-09-24 | 1986-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350876U true JPS6350876U (en, 2012) | 1988-04-06 |
Family
ID=31056133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14500286U Pending JPS6350876U (en, 2012) | 1986-09-24 | 1986-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350876U (en, 2012) |
-
1986
- 1986-09-24 JP JP14500286U patent/JPS6350876U/ja active Pending
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