JPH01167653U - - Google Patents
Info
- Publication number
- JPH01167653U JPH01167653U JP6343788U JP6343788U JPH01167653U JP H01167653 U JPH01167653 U JP H01167653U JP 6343788 U JP6343788 U JP 6343788U JP 6343788 U JP6343788 U JP 6343788U JP H01167653 U JPH01167653 U JP H01167653U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- protective cover
- plate
- cover
- protect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009423 ventilation Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6343788U JPH01167653U (en, 2012) | 1988-05-16 | 1988-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6343788U JPH01167653U (en, 2012) | 1988-05-16 | 1988-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01167653U true JPH01167653U (en, 2012) | 1989-11-24 |
Family
ID=31288939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6343788U Pending JPH01167653U (en, 2012) | 1988-05-16 | 1988-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01167653U (en, 2012) |
-
1988
- 1988-05-16 JP JP6343788U patent/JPH01167653U/ja active Pending