JPS6350876U - - Google Patents
Info
- Publication number
- JPS6350876U JPS6350876U JP14500286U JP14500286U JPS6350876U JP S6350876 U JPS6350876 U JP S6350876U JP 14500286 U JP14500286 U JP 14500286U JP 14500286 U JP14500286 U JP 14500286U JP S6350876 U JPS6350876 U JP S6350876U
- Authority
- JP
- Japan
- Prior art keywords
- transmanipulator
- susceptor
- vacuum
- rod
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図、第２図は、本考案の基板受渡しの原理
図、第３図〜６図は、本考案による搬送装置内で
の搬送受渡しの動作図を示す。
１……導入室、２……超高真空室、３……ゲー
トバルブ、４，５……トランスマニピユレータ、
６……サセプター、７……基板、８……ねじ穴、
９……ねじ棒。
1 and 2 are diagrams showing the principle of substrate transfer according to the present invention, and FIGS. 3 to 6 are diagrams showing the operation of transfer and transfer within the transfer apparatus according to the present invention. 1...Introduction chamber, 2...Ultra-high vacuum chamber, 3...Gate valve, 4, 5...Transmanipulator,
6... Susceptor, 7... Board, 8... Screw hole,
9...Threaded rod.
Claims (1)
両真空室に具備した直線と回転動作ができるトラ
ンスマニピユレータと、基板を保持するサセプタ
ーより成る真空装置において、トランスマニピユ
レータの先端部にねじ棒を設け、サセプターに上
記ねじ棒がねじ込めるねじ穴を設けたことを特徴
とする搬送装置。 In a vacuum device consisting of a vacuum chamber installed via a gate valve, a transmanipulator that can perform linear and rotational movements in both vacuum chambers, and a susceptor that holds the substrate, a screw is attached to the tip of the transmanipulator. A conveyance device characterized in that a rod is provided, and a susceptor is provided with a threaded hole into which the threaded rod can be screwed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14500286U JPS6350876U (en) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14500286U JPS6350876U (en) | 1986-09-24 | 1986-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350876U true JPS6350876U (en) | 1988-04-06 |
Family
ID=31056133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14500286U Pending JPS6350876U (en) | 1986-09-24 | 1986-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350876U (en) |
-
1986
- 1986-09-24 JP JP14500286U patent/JPS6350876U/ja active Pending
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