JPS6350874U - - Google Patents

Info

Publication number

JPS6350874U

JPS6350874U JP14571786U JP14571786U JPS6350874U JP S6350874 U JPS6350874 U JP S6350874U JP 14571786 U JP14571786 U JP 14571786U JP 14571786 U JP14571786 U JP 14571786U JP S6350874 U JPS6350874 U JP S6350874U

Authority

JP

Japan

Prior art keywords

evaporation

ion

source

ion beam

thin film

Prior art date

1986-09-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 5
• 239000010409 thin film Substances 0.000 claims description 4
• 239000000463 material Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims 6
• 230000008020 evaporation Effects 0.000 claims 6
• 238000011144 upstream manufacturing Methods 0.000 claims 1
• 238000007738 vacuum evaporation Methods 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 description 5
• 238000010586 diagram Methods 0.000 description 3
• 238000010894 electron beam technology Methods 0.000 description 1