JPS6350473Y2 - - Google Patents

Info

Publication number
JPS6350473Y2
JPS6350473Y2 JP18061282U JP18061282U JPS6350473Y2 JP S6350473 Y2 JPS6350473 Y2 JP S6350473Y2 JP 18061282 U JP18061282 U JP 18061282U JP 18061282 U JP18061282 U JP 18061282U JP S6350473 Y2 JPS6350473 Y2 JP S6350473Y2
Authority
JP
Japan
Prior art keywords
introduction pipe
gas introduction
main body
vacuum gauge
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18061282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5985397U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18061282U priority Critical patent/JPS5985397U/ja
Publication of JPS5985397U publication Critical patent/JPS5985397U/ja
Application granted granted Critical
Publication of JPS6350473Y2 publication Critical patent/JPS6350473Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP18061282U 1982-12-01 1982-12-01 タ−ボ分子ポンプ Granted JPS5985397U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18061282U JPS5985397U (ja) 1982-12-01 1982-12-01 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18061282U JPS5985397U (ja) 1982-12-01 1982-12-01 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS5985397U JPS5985397U (ja) 1984-06-09
JPS6350473Y2 true JPS6350473Y2 (enrdf_load_stackoverflow) 1988-12-26

Family

ID=30391573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18061282U Granted JPS5985397U (ja) 1982-12-01 1982-12-01 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS5985397U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
JP2808470B2 (ja) * 1990-02-06 1998-10-08 日本原子力研究所 真空ポンプ

Also Published As

Publication number Publication date
JPS5985397U (ja) 1984-06-09

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