JPS6350125U - - Google Patents
Info
- Publication number
- JPS6350125U JPS6350125U JP14468986U JP14468986U JPS6350125U JP S6350125 U JPS6350125 U JP S6350125U JP 14468986 U JP14468986 U JP 14468986U JP 14468986 U JP14468986 U JP 14468986U JP S6350125 U JPS6350125 U JP S6350125U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cup
- nozzle
- scattering
- developer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000003028 elevating effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986144689U JPH0238441Y2 (https=) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986144689U JPH0238441Y2 (https=) | 1986-09-19 | 1986-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6350125U true JPS6350125U (https=) | 1988-04-05 |
| JPH0238441Y2 JPH0238441Y2 (https=) | 1990-10-17 |
Family
ID=31055526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986144689U Expired JPH0238441Y2 (https=) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238441Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123731A (ja) * | 1982-01-19 | 1983-07-23 | Toshiba Corp | 半導体処理装置 |
| JPS59134829A (ja) * | 1983-01-22 | 1984-08-02 | Nec Corp | 半導体スプレ−現像装置 |
-
1986
- 1986-09-19 JP JP1986144689U patent/JPH0238441Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123731A (ja) * | 1982-01-19 | 1983-07-23 | Toshiba Corp | 半導体処理装置 |
| JPS59134829A (ja) * | 1983-01-22 | 1984-08-02 | Nec Corp | 半導体スプレ−現像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238441Y2 (https=) | 1990-10-17 |