JPH0290845U - - Google Patents
Info
- Publication number
- JPH0290845U JPH0290845U JP17020988U JP17020988U JPH0290845U JP H0290845 U JPH0290845 U JP H0290845U JP 17020988 U JP17020988 U JP 17020988U JP 17020988 U JP17020988 U JP 17020988U JP H0290845 U JPH0290845 U JP H0290845U
- Authority
- JP
- Japan
- Prior art keywords
- spindle chuck
- back surface
- cleaning liquid
- cup
- developed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170209U JPH0425705Y2 (https=) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170209U JPH0425705Y2 (https=) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290845U true JPH0290845U (https=) | 1990-07-18 |
| JPH0425705Y2 JPH0425705Y2 (https=) | 1992-06-19 |
Family
ID=31460956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988170209U Expired JPH0425705Y2 (https=) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425705Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS639130U (https=) * | 1986-07-02 | 1988-01-21 |
-
1988
- 1988-12-30 JP JP1988170209U patent/JPH0425705Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS639130U (https=) * | 1986-07-02 | 1988-01-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425705Y2 (https=) | 1992-06-19 |