JPS6349707Y2 - - Google Patents
Info
- Publication number
- JPS6349707Y2 JPS6349707Y2 JP10238082U JP10238082U JPS6349707Y2 JP S6349707 Y2 JPS6349707 Y2 JP S6349707Y2 JP 10238082 U JP10238082 U JP 10238082U JP 10238082 U JP10238082 U JP 10238082U JP S6349707 Y2 JPS6349707 Y2 JP S6349707Y2
- Authority
- JP
- Japan
- Prior art keywords
- chambers
- connecting pipe
- pipe
- chamber
- helium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 33
- 239000001307 helium Substances 0.000 claims description 23
- 229910052734 helium Inorganic materials 0.000 claims description 23
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 23
- 239000007789 gas Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- SFKQVVDKFKYTNA-OGNLOKFRSA-N (2S)-N-[(2R)-6-amino-1-[(2-amino-2-oxoethyl)amino]-1-oxohexan-2-yl]-1-[(4R,7S,10S,13S,16S,19R)-19-amino-7-(2-amino-2-oxoethyl)-10-(3-amino-3-oxopropyl)-13,16-dibenzyl-6,9,12,15,18-pentaoxo-1,2-dithia-5,8,11,14,17-pentazacycloicosane-4-carbonyl]pyrrolidine-2-carboxamide Chemical compound NCCCC[C@@H](NC(=O)[C@@H]1CCCN1C(=O)[C@@H]1CSSC[C@H](N)C(=O)N[C@@H](Cc2ccccc2)C(=O)N[C@@H](Cc2ccccc2)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CC(N)=O)C(=O)N1)C(=O)NCC(N)=O SFKQVVDKFKYTNA-OGNLOKFRSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10238082U JPS596750U (ja) | 1982-07-05 | 1982-07-05 | 漏れ検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10238082U JPS596750U (ja) | 1982-07-05 | 1982-07-05 | 漏れ検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS596750U JPS596750U (ja) | 1984-01-17 |
| JPS6349707Y2 true JPS6349707Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-12-21 |
Family
ID=30241354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10238082U Granted JPS596750U (ja) | 1982-07-05 | 1982-07-05 | 漏れ検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS596750U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-07-05 JP JP10238082U patent/JPS596750U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS596750U (ja) | 1984-01-17 |