JPS6349545B2 - - Google Patents
Info
- Publication number
- JPS6349545B2 JPS6349545B2 JP57183934A JP18393482A JPS6349545B2 JP S6349545 B2 JPS6349545 B2 JP S6349545B2 JP 57183934 A JP57183934 A JP 57183934A JP 18393482 A JP18393482 A JP 18393482A JP S6349545 B2 JPS6349545 B2 JP S6349545B2
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- substrate
- substrate magazine
- guide
- magazine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Centrifugal Separators (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57183934A JPS5973067A (ja) | 1982-10-19 | 1982-10-19 | 遠心分離装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57183934A JPS5973067A (ja) | 1982-10-19 | 1982-10-19 | 遠心分離装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5973067A JPS5973067A (ja) | 1984-04-25 |
| JPS6349545B2 true JPS6349545B2 (OSRAM) | 1988-10-05 |
Family
ID=16144358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57183934A Granted JPS5973067A (ja) | 1982-10-19 | 1982-10-19 | 遠心分離装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5973067A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04107552A (ja) * | 1990-08-28 | 1992-04-09 | Toppan Printing Co Ltd | フィルム位置合せ装置及びそれを用いた位置合せ方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559286U (OSRAM) * | 1978-07-06 | 1980-01-21 | ||
| JPS55127163A (en) * | 1979-03-24 | 1980-10-01 | Mitsubishi Electric Corp | Automatic centrifugal dehydrating apparatus |
| JPS57148455U (OSRAM) * | 1981-03-14 | 1982-09-17 |
-
1982
- 1982-10-19 JP JP57183934A patent/JPS5973067A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04107552A (ja) * | 1990-08-28 | 1992-04-09 | Toppan Printing Co Ltd | フィルム位置合せ装置及びそれを用いた位置合せ方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5973067A (ja) | 1984-04-25 |
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