JPS6349231U - - Google Patents

Info

Publication number
JPS6349231U
JPS6349231U JP14370286U JP14370286U JPS6349231U JP S6349231 U JPS6349231 U JP S6349231U JP 14370286 U JP14370286 U JP 14370286U JP 14370286 U JP14370286 U JP 14370286U JP S6349231 U JPS6349231 U JP S6349231U
Authority
JP
Japan
Prior art keywords
reaction tube
partition plate
reaction
gas
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14370286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14370286U priority Critical patent/JPS6349231U/ja
Publication of JPS6349231U publication Critical patent/JPS6349231U/ja
Pending legal-status Critical Current

Links

JP14370286U 1986-09-18 1986-09-18 Pending JPS6349231U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14370286U JPS6349231U (enrdf_load_stackoverflow) 1986-09-18 1986-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14370286U JPS6349231U (enrdf_load_stackoverflow) 1986-09-18 1986-09-18

Publications (1)

Publication Number Publication Date
JPS6349231U true JPS6349231U (enrdf_load_stackoverflow) 1988-04-04

Family

ID=31053625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14370286U Pending JPS6349231U (enrdf_load_stackoverflow) 1986-09-18 1986-09-18

Country Status (1)

Country Link
JP (1) JPS6349231U (enrdf_load_stackoverflow)

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