JPS62123243U - - Google Patents

Info

Publication number
JPS62123243U
JPS62123243U JP960386U JP960386U JPS62123243U JP S62123243 U JPS62123243 U JP S62123243U JP 960386 U JP960386 U JP 960386U JP 960386 U JP960386 U JP 960386U JP S62123243 U JPS62123243 U JP S62123243U
Authority
JP
Japan
Prior art keywords
tubular substrate
vapor phase
phase synthesis
inlet
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP960386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP960386U priority Critical patent/JPS62123243U/ja
Publication of JPS62123243U publication Critical patent/JPS62123243U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP960386U 1986-01-28 1986-01-28 Pending JPS62123243U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP960386U JPS62123243U (enrdf_load_stackoverflow) 1986-01-28 1986-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP960386U JPS62123243U (enrdf_load_stackoverflow) 1986-01-28 1986-01-28

Publications (1)

Publication Number Publication Date
JPS62123243U true JPS62123243U (enrdf_load_stackoverflow) 1987-08-05

Family

ID=30795070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP960386U Pending JPS62123243U (enrdf_load_stackoverflow) 1986-01-28 1986-01-28

Country Status (1)

Country Link
JP (1) JPS62123243U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS62123243U (enrdf_load_stackoverflow)
JPH0338358U (enrdf_load_stackoverflow)
JPS61198241U (enrdf_load_stackoverflow)
JPS63201621U (enrdf_load_stackoverflow)
JPS6150759U (enrdf_load_stackoverflow)
JPS62190830U (enrdf_load_stackoverflow)
JPH0235436U (enrdf_load_stackoverflow)
JPS6287751U (enrdf_load_stackoverflow)
JPS62122590U (enrdf_load_stackoverflow)
JPS637525U (enrdf_load_stackoverflow)
JPS6265831U (enrdf_load_stackoverflow)
JPS6326725U (enrdf_load_stackoverflow)
JPS6417082U (enrdf_load_stackoverflow)
JPS6171861U (enrdf_load_stackoverflow)
JPS62184101U (enrdf_load_stackoverflow)
JPS6331369U (enrdf_load_stackoverflow)
JPH0168202U (enrdf_load_stackoverflow)
JPH0311641U (enrdf_load_stackoverflow)
JPH0222361U (enrdf_load_stackoverflow)
JPS62164917U (enrdf_load_stackoverflow)
JPS62180033U (enrdf_load_stackoverflow)
JPS61203629U (enrdf_load_stackoverflow)
JPS6220409U (enrdf_load_stackoverflow)
JPS6153579U (enrdf_load_stackoverflow)
JPS62146792U (enrdf_load_stackoverflow)