JPS6349231U - - Google Patents
Info
- Publication number
- JPS6349231U JPS6349231U JP14370286U JP14370286U JPS6349231U JP S6349231 U JPS6349231 U JP S6349231U JP 14370286 U JP14370286 U JP 14370286U JP 14370286 U JP14370286 U JP 14370286U JP S6349231 U JPS6349231 U JP S6349231U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- partition plate
- reaction
- gas
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 10
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14370286U JPS6349231U (OSRAM) | 1986-09-18 | 1986-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14370286U JPS6349231U (OSRAM) | 1986-09-18 | 1986-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6349231U true JPS6349231U (OSRAM) | 1988-04-04 |
Family
ID=31053625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14370286U Pending JPS6349231U (OSRAM) | 1986-09-18 | 1986-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6349231U (OSRAM) |
-
1986
- 1986-09-18 JP JP14370286U patent/JPS6349231U/ja active Pending