JPH01169024U - - Google Patents

Info

Publication number

JPH01169024U

JPH01169024U JP6452488U JP6452488U JPH01169024U JP H01169024 U JPH01169024 U JP H01169024U JP 6452488 U JP6452488 U JP 6452488U JP 6452488 U JP6452488 U JP 6452488U JP H01169024 U JPH01169024 U JP H01169024U

Authority

JP

Japan

Prior art keywords

exhaust hole

wafers

quartz tube

diffusion furnace

vertical diffusion

Prior art date

1988-05-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000009792 diffusion process Methods 0.000 claims description 3
• 238000005192 partition Methods 0.000 claims description 3
• 239000010453 quartz Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
• 235000012431 wafers Nutrition 0.000 claims 2
• 238000001816 cooling Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000011810 insulating material Substances 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1