JPS6348707U - - Google Patents
Info
- Publication number
- JPS6348707U JPS6348707U JP14238486U JP14238486U JPS6348707U JP S6348707 U JPS6348707 U JP S6348707U JP 14238486 U JP14238486 U JP 14238486U JP 14238486 U JP14238486 U JP 14238486U JP S6348707 U JPS6348707 U JP S6348707U
- Authority
- JP
- Japan
- Prior art keywords
- transfer device
- cleanliness
- clean room
- cargo
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 2
- 230000003749 cleanliness Effects 0.000 claims 4
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Ventilation (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986142384U JPH0318407Y2 (cs) | 1986-09-17 | 1986-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986142384U JPH0318407Y2 (cs) | 1986-09-17 | 1986-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6348707U true JPS6348707U (cs) | 1988-04-02 |
| JPH0318407Y2 JPH0318407Y2 (cs) | 1991-04-18 |
Family
ID=31051071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986142384U Expired JPH0318407Y2 (cs) | 1986-09-17 | 1986-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318407Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009154983A (ja) * | 2007-12-25 | 2009-07-16 | Asyst Technologies Japan Inc | 保管庫及び入出庫方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6168005U (cs) * | 1984-10-11 | 1986-05-09 |
-
1986
- 1986-09-17 JP JP1986142384U patent/JPH0318407Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6168005U (cs) * | 1984-10-11 | 1986-05-09 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009154983A (ja) * | 2007-12-25 | 2009-07-16 | Asyst Technologies Japan Inc | 保管庫及び入出庫方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0318407Y2 (cs) | 1991-04-18 |