JPS6348169U - - Google Patents
Info
- Publication number
- JPS6348169U JPS6348169U JP14234686U JP14234686U JPS6348169U JP S6348169 U JPS6348169 U JP S6348169U JP 14234686 U JP14234686 U JP 14234686U JP 14234686 U JP14234686 U JP 14234686U JP S6348169 U JPS6348169 U JP S6348169U
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- air
- chamber
- humidifier
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007613 environmental effect Effects 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000012774 insulation material Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14234686U JPS6348169U (enExample) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14234686U JPS6348169U (enExample) | 1986-09-16 | 1986-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6348169U true JPS6348169U (enExample) | 1988-04-01 |
Family
ID=31050995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14234686U Pending JPS6348169U (enExample) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6348169U (enExample) |
-
1986
- 1986-09-16 JP JP14234686U patent/JPS6348169U/ja active Pending
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