JPS6347217U - - Google Patents

Info

Publication number
JPS6347217U
JPS6347217U JP13862886U JP13862886U JPS6347217U JP S6347217 U JPS6347217 U JP S6347217U JP 13862886 U JP13862886 U JP 13862886U JP 13862886 U JP13862886 U JP 13862886U JP S6347217 U JPS6347217 U JP S6347217U
Authority
JP
Japan
Prior art keywords
light
glass
detection device
pressurized gas
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13862886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413614Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13862886U priority Critical patent/JPH0413614Y2/ja
Publication of JPS6347217U publication Critical patent/JPS6347217U/ja
Application granted granted Critical
Publication of JPH0413614Y2 publication Critical patent/JPH0413614Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Prevention Of Fouling (AREA)
JP13862886U 1986-09-10 1986-09-10 Expired JPH0413614Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13862886U JPH0413614Y2 (enrdf_load_stackoverflow) 1986-09-10 1986-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13862886U JPH0413614Y2 (enrdf_load_stackoverflow) 1986-09-10 1986-09-10

Publications (2)

Publication Number Publication Date
JPS6347217U true JPS6347217U (enrdf_load_stackoverflow) 1988-03-30
JPH0413614Y2 JPH0413614Y2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=31043788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13862886U Expired JPH0413614Y2 (enrdf_load_stackoverflow) 1986-09-10 1986-09-10

Country Status (1)

Country Link
JP (1) JPH0413614Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2502443B2 (ja) * 1991-01-30 1996-05-29 日本鋼管株式会社 エリプソメ―タ及びこれを用いた塗布厚制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2502443B2 (ja) * 1991-01-30 1996-05-29 日本鋼管株式会社 エリプソメ―タ及びこれを用いた塗布厚制御方法

Also Published As

Publication number Publication date
JPH0413614Y2 (enrdf_load_stackoverflow) 1992-03-30

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