JPS6347217U - - Google Patents
Info
- Publication number
- JPS6347217U JPS6347217U JP13862886U JP13862886U JPS6347217U JP S6347217 U JPS6347217 U JP S6347217U JP 13862886 U JP13862886 U JP 13862886U JP 13862886 U JP13862886 U JP 13862886U JP S6347217 U JPS6347217 U JP S6347217U
- Authority
- JP
- Japan
- Prior art keywords
- light
- glass
- detection device
- pressurized gas
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010926 purge Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010186 staining Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Prevention Of Fouling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862886U JPH0413614Y2 (enrdf_load_html_response) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862886U JPH0413614Y2 (enrdf_load_html_response) | 1986-09-10 | 1986-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347217U true JPS6347217U (enrdf_load_html_response) | 1988-03-30 |
| JPH0413614Y2 JPH0413614Y2 (enrdf_load_html_response) | 1992-03-30 |
Family
ID=31043788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13862886U Expired JPH0413614Y2 (enrdf_load_html_response) | 1986-09-10 | 1986-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413614Y2 (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2502443B2 (ja) * | 1991-01-30 | 1996-05-29 | 日本鋼管株式会社 | エリプソメ―タ及びこれを用いた塗布厚制御方法 |
-
1986
- 1986-09-10 JP JP13862886U patent/JPH0413614Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2502443B2 (ja) * | 1991-01-30 | 1996-05-29 | 日本鋼管株式会社 | エリプソメ―タ及びこれを用いた塗布厚制御方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0413614Y2 (enrdf_load_html_response) | 1992-03-30 |
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