JPS6346834U - - Google Patents

Info

Publication number
JPS6346834U
JPS6346834U JP13937586U JP13937586U JPS6346834U JP S6346834 U JPS6346834 U JP S6346834U JP 13937586 U JP13937586 U JP 13937586U JP 13937586 U JP13937586 U JP 13937586U JP S6346834 U JPS6346834 U JP S6346834U
Authority
JP
Japan
Prior art keywords
install
vacuum container
utility
combination
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13937586U
Other languages
English (en)
Other versions
JPH0717377Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986139375U priority Critical patent/JPH0717377Y2/ja
Publication of JPS6346834U publication Critical patent/JPS6346834U/ja
Application granted granted Critical
Publication of JPH0717377Y2 publication Critical patent/JPH0717377Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係わる真空装置の一実施例を
示す縦断面図、第２図は本考案の他の実施例を示
す第１図同様の縦断面図、第３図は通気整流装置
を備えていない既存の真空容器に本考案を適用し
た一実施例の要部切断面である。 １：真空容器、２：排気管、３：通気管、４：
妨害板、５：支柱、６：多孔板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空容器の通気管開口部に、妨害板、多孔板、
    またはそれらの組合せからなる通気整流装置が設
    けられているところの真空装置。
JP1986139375U 1986-09-12 1986-09-12 真空装置 Expired - Lifetime JPH0717377Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986139375U JPH0717377Y2 (ja) 1986-09-12 1986-09-12 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986139375U JPH0717377Y2 (ja) 1986-09-12 1986-09-12 真空装置

Publications (2)

Publication Number Publication Date
JPS6346834U true JPS6346834U (ja) 1988-03-30
JPH0717377Y2 JPH0717377Y2 (ja) 1995-04-26

Family

ID=31045222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986139375U Expired - Lifetime JPH0717377Y2 (ja) 1986-09-12 1986-09-12 真空装置

Country Status (1)

Country Link
JP (1) JPH0717377Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02184333A (ja) * 1989-01-12 1990-07-18 Tokyo Electron Ltd ロードロック装置を備えた処理装置
CN112718727A (zh) * 2021-01-27 2021-04-30 河北君业科技股份有限公司 一种保温管滚动传送隔档装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132535A (ja) * 1985-12-05 1987-06-15 Toyota Motor Corp 真空圧力容器
JPH0517144U (ja) * 1991-08-07 1993-03-05 株式会社アツギユニシア 内燃機関用ピストン

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132535A (ja) * 1985-12-05 1987-06-15 Toyota Motor Corp 真空圧力容器
JPH0517144U (ja) * 1991-08-07 1993-03-05 株式会社アツギユニシア 内燃機関用ピストン

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02184333A (ja) * 1989-01-12 1990-07-18 Tokyo Electron Ltd ロードロック装置を備えた処理装置
CN112718727A (zh) * 2021-01-27 2021-04-30 河北君业科技股份有限公司 一种保温管滚动传送隔档装置

Also Published As

Publication number Publication date
JPH0717377Y2 (ja) 1995-04-26

Similar Documents

Publication Publication Date Title
JPS58161032U (ja) 屋根における棟換気装置
JPS6346834U (ja)
JPH0478416U (ja)
JPH01125944U (ja)
JPS6160027U (ja)
JPH0336595U (ja)
JPH0313271U (ja)
JPH0399032U (ja)
JPS62181811U (ja)
JPS639373U (ja)
JPH02102257U (ja)
JPS624670U (ja)
JPH0457425U (ja)
JPS6148827U (ja)
JPH0358521U (ja)
JPS61104134U (ja)
JPS6243236U (ja)
JPS62203844U (ja)
JPS62140917U (ja)
JPS62127433U (ja)
JPS6392017U (ja)
JPH0428495U (ja)
JPS6299716U (ja)
JPS62155140U (ja)
JPS5995079U (ja) ケ−スの防雨装置