JPS6345282B2 - - Google Patents
Info
- Publication number
- JPS6345282B2 JPS6345282B2 JP10324583A JP10324583A JPS6345282B2 JP S6345282 B2 JPS6345282 B2 JP S6345282B2 JP 10324583 A JP10324583 A JP 10324583A JP 10324583 A JP10324583 A JP 10324583A JP S6345282 B2 JPS6345282 B2 JP S6345282B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- holding member
- dicing
- bamboo
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 24
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 19
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 19
- 241001330002 Bambuseae Species 0.000 claims description 19
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 19
- 239000011425 bamboo Substances 0.000 claims description 19
- 238000005520 cutting process Methods 0.000 claims description 10
- 239000000835 fiber Substances 0.000 claims description 7
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 14
- 230000001070 adhesive effect Effects 0.000 description 14
- 238000000034 method Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000601 superalloy Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Description
【発明の詳細な説明】
本発明は、ガラス、セラミツクス、フエライ
ト、半導体材料、磁性材料、超合金などのワーク
を薄くスライスしたり、微小寸法にダイシング加
工するのに用いるワークの精密切断用保持部材に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention provides a holding member for precision cutting of a workpiece, which is used for slicing a workpiece of glass, ceramics, ferrite, semiconductor material, magnetic material, superalloy, etc. into thin pieces or dicing it into minute dimensions. Regarding.
従来、ワーク保持材としては、ガラス、ベーク
ライト、カーボン素焼材などが用いられてきた。 Conventionally, glass, Bakelite, carbon clay, and the like have been used as workpiece holding materials.
しかし、これらのワーク保持材は、いずれも硬
くてもろい性質を有するから、ダイヤモンドブレ
ードにより形成されるワーク接着面の切り込み部
分で破損され易く、スライスし得る厚さやダイシ
ング片（チツプ、ペレツト）の寸法に一定の限界
があつた。また、かかる硬くてもろいワーク保持
材は、同じ材質や硬度のワークとともにブレード
刃先の磨耗をはやめ、切れ味を悪くする。 However, all of these workpiece holding materials have hard and brittle properties, so they are easily damaged by the cut portion of the workpiece bonding surface formed by the diamond blade, and the thickness of the workpiece that can be sliced and the size of the dicing pieces (chips, pellets) are limited. had certain limits. In addition, such a hard and brittle workpiece holding material, together with a workpiece made of the same material and hardness, will cause the blade edge to wear out quickly, making the blade less sharp.
このため、例えばより薄い厚さのワークのスラ
イス片を必要とする場合には、ワークを薄切り可
能な厚さにスライスしたのち、該スライス片を所
定の厚さまでラツピング加工しなければならな
い。このため工程数が多くなり、加工に余分な人
手と費用を要するとともに、ラツピング加工によ
り研磨した分がワークの材料損失となるため、ス
ライス片の厚さが薄くなるにつれて加工に要する
費用は著しく割高になる不都合があつた。 For this reason, for example, if a slice of a workpiece with a thinner thickness is required, the workpiece must be sliced to a thickness that can be sliced into thin pieces, and then the sliced piece must be wrapped to a predetermined thickness. This increases the number of steps, requiring extra manpower and expense for processing, and the amount of material polished by the wrapping process results in a loss of material from the workpiece, so as the thickness of the sliced piece becomes thinner, the cost required for processing becomes significantly higher. There were some inconveniences.
さらに、加工後ワークと分離して捨てられるワ
ーク保持材は、消耗材料としては価格が高く、か
つ不燃性のため、加工後の後始末にも手数と費用
を要する。 Further, the workpiece holding material, which is separated from the workpiece after processing and thrown away, is expensive as a consumable material and is nonflammable, so cleaning up after the processing is also troublesome and costly.
本発明は上記不都合を悉く解消するワーク保持
部材を提供するものである。 The present invention provides a workpiece holding member that eliminates all of the above-mentioned disadvantages.
本発明では、ワーク保持部材１は竹材によつて
形成され、該竹材は、竹材の繊維１ａ方向がワー
ク２のスライス切断方向やダイシングの各切断方
向と平行で、かつワーク２との接着面１ｂに垂直
となるようワーク２に接着されていることを特徴
とする。 In the present invention, the workpiece holding member 1 is made of bamboo material, and the direction of the fibers 1a of the bamboo material is parallel to the slicing direction of the workpiece 2 and each cutting direction of dicing, and the adhesive surface 1b with the workpiece 2 It is characterized by being glued to the workpiece 2 so as to be perpendicular to .
本発明の構成を、ワークをスライスする場合に
ついて説明すれば、竹の幹材で作られたワーク保
持部材１は、ワーク２のスライスされる末端側で
接着剤３によつて接着され、かつワーク２ととも
に上端面を加工機の取付け治具４に接着剤３で接
着されて、矢印Ｐで示す方向に加工送りされる。 The structure of the present invention will be described with reference to the case of slicing a workpiece. A workpiece holding member 1 made of bamboo trunk material is attached to the end side of a workpiece 2 to be sliced with an adhesive 3, and 2 and its upper end surface are bonded to a mounting jig 4 of a processing machine with adhesive 3, and processed and fed in the direction shown by arrow P.
ワーク２は、単体２Ａの大きさが大きいときに
は、竹の幹材よりなるワーク保持部材１に１個だ
けで接着されるが、単体２Ａの大きさが小さいと
きには、それらの単体２Ａを接着剤３によつて接
着して適当な大きさに形成した集合体２Ｂを、ワ
ーク保持部材１に接着して加工能率を向上する。 When the size of the single pieces 2A is large, only one piece of work 2 is glued to the work holding member 1 made of bamboo trunk material, but when the size of the single pieces 2A is small, the single pieces 2A are glued to the work holding member 1 made of bamboo trunk material. The assembly 2B, which has been bonded to an appropriate size by bonding, is bonded to the workpiece holding member 1 to improve processing efficiency.
ワーク保持部材１は、ワーク２の大きさの大小
により、竹から作り出された単体１Ａの平板を用
いたり、所定の長さに切断した竹材をその竹質繊
維１ａの方向に分割し、各分割片１B1を第４図
に示す如く接着剤３により適当な大きさに形成し
た集積体１Ｂとして用いることができる。 Depending on the size of the workpiece 2, the workpiece holding member 1 may be a single 1A flat plate made from bamboo, or a bamboo material cut to a predetermined length is divided in the direction of the bamboo fibers 1a, and each division is The piece 1B1 can be formed into an appropriate size with an adhesive 3 as shown in FIG. 4 and used as an assembly 1B.
本発明に係るワーク保持部材１を用いてワーク
２から多数のスライス片２ａを切断する動作を第
２図と第３図について説明する。 The operation of cutting a large number of slice pieces 2a from a workpiece 2 using the workpiece holding member 1 according to the present invention will be explained with reference to FIGS. 2 and 3. FIG.
取付け治具４に接着させたワーク２とワーク保
持部材１とを、加工機に接着したドーナツ型のダ
イヤモンドブレード５の内刃６内に位置させる。
ブレード５を矢印Ｑで示す方向に回転し、ワーク
２を取付け治具４により矢印Ｐで示す加工送り方
向に、ワーク保持部材１のワーク接着面１ｂがブ
レード５の内刃６によつて切り込み７を形成され
る仮想線の位置まで移動すれば、ワーク２は完全
にスライスされる。次いで、取付け治具４を仮想
線で示す位置から元の実線で示す位置まで戻した
のち、矢印Ｒで示す如く、垂直下側にスライスし
たい厚さだけ移動し、前記各動作を繰り返し行わ
せれば、所定厚さのスライス片２ａがワーク２の
下側から順に形成される。 The workpiece 2 and workpiece holding member 1 bonded to the mounting jig 4 are positioned within the inner cutter 6 of a donut-shaped diamond blade 5 bonded to a processing machine.
The blade 5 is rotated in the direction shown by the arrow Q, and the workpiece 2 is attached to the mounting jig 4 in the machining feed direction shown by the arrow P. When the workpiece 2 is moved to the position of the virtual line to be formed, the workpiece 2 is completely sliced. Next, after returning the mounting jig 4 from the position shown by the imaginary line to the original position shown by the solid line, move it vertically downward by the thickness desired for slicing, as shown by arrow R, and repeat each of the above operations. , slice pieces 2a of a predetermined thickness are sequentially formed from the bottom of the workpiece 2.
この場合、ワーク接着面１ｂ側のワーク保持部
材１にワーク２のスライス片２ａと同じ厚さの短
いスライス片１ｃ（第２図の斜線部分）が形成さ
れるが、このスライス片１ｃでは、竹材の繊維方
向はワーク接着面１ｂに垂直であるとともにスラ
イス方向に平行であり、所定厚さに切断されたス
ライス片２ａの保持作用において、きわめてすぐ
れた靭性と弾性とを発揮するから、従来の保持材
がブレード５によつて破損される厚さよりさらに
薄く切断された場合にも破損されることはない。
このため、ワーク２のスライスできる厚さを著し
く薄くすることができる。 In this case, a short slice piece 1c (hatched area in FIG. 2) having the same thickness as the slice piece 2a of the workpiece 2 is formed on the workpiece holding member 1 on the workpiece adhesion surface 1b side. The fiber direction is perpendicular to the workpiece bonding surface 1b and parallel to the slicing direction, and exhibits extremely excellent toughness and elasticity in the holding action of the slice piece 2a cut to a predetermined thickness. Even if the material is cut thinner than the thickness at which it will be damaged by the blade 5, it will not be damaged.
Therefore, the thickness of the workpiece 2 that can be sliced can be significantly reduced.
また、本発明のワーク保持部材１は、従来のも
のに比べて柔らかくブレード５の内刃６を磨耗す
ることが少ないから、次の切断加工を切れ味のよ
い状態で行うことができ、この面からもワーク２
の薄切りに対して寄与することができる。 In addition, the work holding member 1 of the present invention is softer than conventional ones and causes less wear on the inner edge 6 of the blade 5, so the next cutting process can be performed with good sharpness. Mo work 2
It can contribute to thin slicing.
ワーク保持部材１の接着面１ｂに一端を保持さ
れたワーク２の多数のスライス片２ａは、ワーク
２の接着部を接着剤３の溶剤中に浸漬して、ワー
ク保持部材１と取付け治具４から分離する。 A large number of slice pieces 2a of the workpiece 2, one end of which is held on the adhesive surface 1b of the workpiece holding member 1, are attached to the workpiece holding member 1 and the mounting jig 4 by dipping the adhesive part of the workpiece 2 into the solvent of the adhesive 3. Separate from.
竹材で構成したワーク保持部材１は、スライス
加工だけでなく、微少なチツプを作るダイシング
加工にも用いることができる。この場合、ワーク
２としてはインゴツトではなく、前記実施例によ
つて切断されたスライス片２ａや、電気その他に
ついて所定の特性値を付与された薄板２a′が用い
られる。 The workpiece holding member 1 made of bamboo material can be used not only for slicing processing but also for dicing processing to produce minute chips. In this case, the workpiece 2 used is not an ingot, but a sliced piece 2a cut according to the embodiment described above, or a thin plate 2a' imparted with predetermined electrical and other characteristic values.
ダイシング加工は、第５図に示す如く、スライ
ス片２ａ等のワーク２が接着されたワーク保持部
材１をガラス板８に接着剤３で取付け、ガラス板
８をダイシングマシンの真空取付け部（図示せ
ず）に載置して固定する。次いで、ダイヤモンド
ブレード５Ａの外刃６Ａにより、ワーク２を図示
の如く直角な二方向に切断すれば、保持部材１は
ワーク２との接着面にダイシング片２ｂと同じ大
きさで一定深さの図示しない多数の切り込み片を
形成される。この切り込み片でも、竹材の繊維方
向はワーク２の接着面と垂直で、ダイシングの各
切断方向と平行であり、ダイシング片２ｂの保持
作用においても、竹材のすぐれた靭性と弾性を発
揮してブレード５Ａによつて破損されることがな
いため、各ダイシング片２ｂは、ワーク保持部材
１に確実に保持され、微小寸法のダイシング加工
が可能になる。ダイシング片２ｂのワーク保持部
材１からの分離は、ワーク２の接着部を接着剤３
の溶剤中に一定時間浸漬して行う。 In the dicing process, as shown in FIG. 5, the workpiece holding member 1 to which the workpiece 2 such as the slice piece 2a is attached is attached to the glass plate 8 with an adhesive 3, and the glass plate 8 is attached to the vacuum attachment part of the dicing machine (not shown). 2) and fix it. Next, when the workpiece 2 is cut in two perpendicular directions as shown in the figure with the outer cutter 6A of the diamond blade 5A, the holding member 1 has a groove with the same size and constant depth as the dicing piece 2b on the adhesive surface with the workpiece 2. A large number of notched pieces are formed. Even in this cut piece, the fiber direction of the bamboo material is perpendicular to the adhesive surface of the workpiece 2 and parallel to each cutting direction of dicing, and the bamboo material exhibits its excellent toughness and elasticity in the holding action of the dicing piece 2b. 5A, each dicing piece 2b is reliably held by the workpiece holding member 1, making it possible to perform dicing with minute dimensions. To separate the dicing piece 2b from the workpiece holding member 1, apply adhesive 3 to the adhesive part of the workpiece 2.
This is done by immersing it in a solvent for a certain period of time.
本発明は以上説明したように、スライス加工や
ダイシング加工が施されるワークに、竹材によつ
て形成されたワーク保持部材を接着するととも
に、ワーク保持部材の繊維方向をワークのスライ
ス切断方向やダイシングの各切断方向と平行で、
かつワークとの接着面に垂直になるようにしたも
のであるから、簡単な構造で、従来の保持材を用
いる場合に比べて、ワークのスライスできる厚さ
とダイシングできるタテ・ヨコ寸法を著しく小さ
くすることができる。また、スライス加工やダイ
シング加工を行うブレードは、従来より柔らかい
ワーク保持部材の接着面に切り込みを入れるか
ら、磨耗が少なく、切れ味のよい刃先によつて高
精度の加工を行うことができる。その上、ワーク
保持部材は、竹材で加工が容易な上に可燃物であ
るから、製作コストが安く、使用後の処理も公害
なしに容易に行える利点がある。 As explained above, the present invention adheres a workpiece holding member made of bamboo material to a workpiece to be subjected to slicing or dicing, and aligns the fiber direction of the workpiece holding member with the slicing direction of the workpiece or the dicing process. parallel to each cutting direction of
In addition, since it is perpendicular to the adhesive surface with the workpiece, it has a simple structure and significantly reduces the thickness of the workpiece that can be sliced and the vertical and horizontal dimensions that can be diced compared to when using conventional holding materials. be able to. In addition, the blade for slicing or dicing cuts into the adhesive surface of the workpiece holding member, which is softer than before, so there is less wear and the sharp cutting edge allows for highly accurate processing. Moreover, since the workpiece holding member is made of bamboo and is easy to process, and is combustible, it has the advantage of being inexpensive to manufacture and easy to dispose of after use without causing pollution.
第１図ないし第３図は、ワークをスライス加工
する場合の実施例であつて、第１図は本発明の一
実施例の斜面図、第２図はスライス加工説明のた
めの平面図、第３図ａは同断面正面図で、第３図
ｂはその要部詳細図、第４図は他の実施例を示す
斜面図、第５図はダイシング加工に用いられる場
合の一実施例を示す斜面図である。
１…ワーク保持部材、１Ａ…竹の単体、１Ｂ…
集積体、１B1…竹の分割片、１ａ…竹材の繊維、
１ｂ…ワーク接着面、２…ワーク。
1 to 3 show an embodiment in which a workpiece is sliced. FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is a plan view for explaining the slicing process, and FIG. Fig. 3a is a front view of the same cross section, Fig. 3b is a detailed view of the main part, Fig. 4 is a perspective view showing another embodiment, and Fig. 5 is an embodiment when used for dicing processing. It is a slope view. 1... Work holding member, 1A... Single piece of bamboo, 1B...
Aggregate, 1B 1 ...Bamboo segment, 1a...Bamboo fiber,
1b... Workpiece adhesion surface, 2... Workpiece.
Claims (1)
竹材は、竹材の繊維方向がワークのスライス切断
方向やダイシングの各切断方向と平行で、かつワ
ークとの接着面に垂直となるようワークに接着さ
れている ワークの精密切断用保持部材。 ２ ワーク保持部材は竹材の切断片を複数個接着
して形成された集積体である特許請求の範囲第１
項記載のワークの精密切断用保持部材。[Claims] 1. The workpiece holding member is made of bamboo material, and the bamboo material has a fiber direction parallel to the slicing direction of the workpiece and each cutting direction of dicing, and perpendicular to the bonding surface with the workpiece. A holding member for precision cutting of a workpiece, which is bonded to the workpiece so that 2. Claim 1, wherein the workpiece holding member is an aggregate formed by gluing together a plurality of cut pieces of bamboo material.
A holding member for precision cutting of the workpiece described in Section 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10324583A JPS6068909A (en) | 1983-06-09 | 1983-06-09 | Holding member for precise cutting of work |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10324583A JPS6068909A (en) | 1983-06-09 | 1983-06-09 | Holding member for precise cutting of work |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6068909A JPS6068909A (en) | 1985-04-19 |
| JPS6345282B2 true JPS6345282B2 (en) | 1988-09-08 |
Family
ID=14349053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10324583A Granted JPS6068909A (en) | 1983-06-09 | 1983-06-09 | Holding member for precise cutting of work |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6068909A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4995493A (en) * | 1990-03-02 | 1991-02-26 | General Motors Corporation | Robot tool changer and overload device |
-
1983
- 1983-06-09 JP JP10324583A patent/JPS6068909A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6068909A (en) | 1985-04-19 |
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