JPS6344444U - - Google Patents
Info
- Publication number
- JPS6344444U JPS6344444U JP13722286U JP13722286U JPS6344444U JP S6344444 U JPS6344444 U JP S6344444U JP 13722286 U JP13722286 U JP 13722286U JP 13722286 U JP13722286 U JP 13722286U JP S6344444 U JPS6344444 U JP S6344444U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- shaft
- wafer
- connecting portion
- shaft connecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13722286U JPH021861Y2 (https=) | 1986-09-05 | 1986-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13722286U JPH021861Y2 (https=) | 1986-09-05 | 1986-09-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6344444U true JPS6344444U (https=) | 1988-03-25 |
| JPH021861Y2 JPH021861Y2 (https=) | 1990-01-17 |
Family
ID=31041076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13722286U Expired JPH021861Y2 (https=) | 1986-09-05 | 1986-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021861Y2 (https=) |
-
1986
- 1986-09-05 JP JP13722286U patent/JPH021861Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH021861Y2 (https=) | 1990-01-17 |