JPS6344437U - - Google Patents
Info
- Publication number
- JPS6344437U JPS6344437U JP13816386U JP13816386U JPS6344437U JP S6344437 U JPS6344437 U JP S6344437U JP 13816386 U JP13816386 U JP 13816386U JP 13816386 U JP13816386 U JP 13816386U JP S6344437 U JPS6344437 U JP S6344437U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- light source
- lamp
- source lamp
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13816386U JPS6344437U (fr) | 1986-09-09 | 1986-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13816386U JPS6344437U (fr) | 1986-09-09 | 1986-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6344437U true JPS6344437U (fr) | 1988-03-25 |
Family
ID=31042895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13816386U Pending JPS6344437U (fr) | 1986-09-09 | 1986-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6344437U (fr) |
-
1986
- 1986-09-09 JP JP13816386U patent/JPS6344437U/ja active Pending
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