JPS6344125A - Glass pipe sheathing type sensor - Google Patents
Glass pipe sheathing type sensorInfo
- Publication number
- JPS6344125A JPS6344125A JP61187858A JP18785886A JPS6344125A JP S6344125 A JPS6344125 A JP S6344125A JP 61187858 A JP61187858 A JP 61187858A JP 18785886 A JP18785886 A JP 18785886A JP S6344125 A JPS6344125 A JP S6344125A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- glass pipe
- temperature
- uniform
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 18
- 230000001419 dependent effect Effects 0.000 claims abstract description 14
- 239000011253 protective coating Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 8
- 238000010438 heat treatment Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract description 3
- 230000004043 responsiveness Effects 0.000 abstract 2
- 230000004927 fusion Effects 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 24
- 238000001514 detection method Methods 0.000 description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は、測定対象流体の流路にこれを設置して、温
度依存性抵抗膜と流体間の熱伝達を利用することにより
流体の流量または流速を検出することを主たる目的とす
る感熱型流体検出用センサーに関するものであるが、こ
のセンサーはまた測定対象雰囲気中にこれ？設置して、
温度依存性抵抗膜の抵抗値から雰囲気の温度を検出する
ことを目的とする感温抵抗体としても使用することが出
来ろものである。[Detailed Description of the Invention] [Technical Field of the Invention] This invention measures the flow rate of a fluid by installing it in a flow path of a fluid to be measured and utilizing heat transfer between a temperature-dependent resistive film and the fluid. This relates to a heat-sensitive fluid detection sensor whose main purpose is to detect flow velocity, but this sensor also detects the presence of water in the atmosphere to be measured. Install it and
It can also be used as a temperature-sensitive resistor for the purpose of detecting the temperature of the atmosphere from the resistance value of the temperature-dependent resistive film.
従来この種の感熱型流体検出用センサーとして知られて
いるものは第１図に示すようなものであった。A conventionally known heat-sensitive fluid detection sensor of this type is shown in FIG.
即ち、第１図に於て、（１）はセラミックまたは石英な
どから成る円筒形絶縁管、（２）は円筒形絶縁管（１＋
の外表面上に形成した温度依存性抵抗膜で、この場合例
えば白金抵抗膜、１３）は上記円筒形絶縁管＋１）の両
端開口部からその内部に一端を挿入して固定したリード
、（４）はこのリード（３）と円筒形絶縁管（１）とを
接続する為の導電性ペーストで、この場合例えば白金ベ
ース） 、（５）は感熱型流体検出用センサーの抵抗値
が所望の値を示すように前記温２度依存性抵抗膜１２）
に螺旋状に形成したトリミング溝、（６）は前記温度依
存性抵抗膜（２）及びトリミング溝（５）の上に塗布し
て形成したコーテイング膜である。That is, in Fig. 1, (1) is a cylindrical insulating tube made of ceramic or quartz, and (2) is a cylindrical insulating tube (1+
13) is a temperature-dependent resistive film formed on the outer surface of the cylindrical insulating tube +1), in this case, for example, a platinum resistive film; ) is a conductive paste for connecting this lead (3) and the cylindrical insulating tube (1), in this case, for example, platinum base), and (5) is a conductive paste for connecting the lead (3) to the cylindrical insulating tube (1). As shown in the above-mentioned temperature 2 degree dependent resistance film 12)
A trimming groove (6) formed in a spiral shape is a coating film formed by coating on the temperature-dependent resistance film (2) and the trimming groove (5).
以上のような構成を有する感熱型流体検出用センサーの
使用方法は次のとえりである。The method of using the heat-sensitive fluid detection sensor having the above configuration is as follows.
即ち、まず、流体通路にこの感熱型流体検出用センサー
を設け、これに予め通電して流体温度よりイ）高い温度
に加熱してお（。That is, first, this heat-sensitive fluid detection sensor is installed in the fluid passage, and it is heated in advance to a temperature higher than the fluid temperature by energizing it.
この加熱された感熱型流体検出用センサーに流体が肖る
と、流体の流者及び流速に応じた熱量が該感熱型流体検
出用センサーから奪われ、その際の流体流量Ｑと熱→ｋ
ＩＩとの間には、次に示すキングの関係式が成立するこ
とが一般に知られている。When fluid comes into contact with this heated thermosensitive fluid detection sensor, the amount of heat corresponding to the flower and flow velocity of the fluid is taken away from the thermosensitive fluid detection sensor, and the fluid flow rate Q and heat→k
It is generally known that the following King's relational expression holds between .
）１ ＝ （Ａ−＋−Ｂ、／’Ｗ ＞ ＣＴｌ−１−Ｔ
ｈ ）但し、Ａ及びＢは定数、ＴＨ−Ｔ龜
はセンサーと流体との温度差である、
従って、上記センサーと流体との温度差を一定に保持し
、熱−ＩＨまたはそれに相当する加熱電流を検出するこ
とにより、流体の流計または流速を測定することが出来
る・
〔この発明が解決しようとする問題点〕第１図に基づい
て一ヒ述した従来の感ｐ′Ａ型流体検出用センサーに於
ては、コーティング７摸（６）の厚みを一定に制御する
ことが困難で、ｂるところから、いきおい不均一な厚み
の層となることを避は難（、その＠朱として、核部分の
有する熱容前の不均衡によってセンサーの応答が不均一
となり、時定数もセンサーによってばらつく等の欠陥が
あった。)1 = (A-+-B, /'W > CTl-1-T
h) However, A and B are constants, and TH-T is the temperature difference between the sensor and the fluid. Therefore, the temperature difference between the sensor and the fluid is kept constant, and the heating current is [Problems to be solved by this invention] The conventional p'A type fluid detection method described above based on FIG. In sensors, it is difficult to control the thickness of the coating 7 (6) at a constant level, so it is inevitable that the layer will have an uneven thickness. Due to the imbalance before the heat capacity of the core, the response of the sensor was non-uniform, and the time constant varied depending on the sensor.
また、コーテイング膜（６）を形成することそれ自体に
ついても、極めて慎重を要てろ困難な作業を伴うところ
から、余分の手間がかかり、コストも高くつく欠点があ
った。Further, the formation of the coating film (6) itself is a difficult and delicate operation, which requires extra effort and costs.
Ｃ問題点を解決する手段〕
この発明は、従来の感熱型流体検出用センサー罠不町避
であった上記のような欠陥を解消する為になされたもの
でちって、温度依存性抵抗膜（２）に螺旋状の溝（５）
を］を宜方法、例えばレーザー’ｊｒｌ工法を用いて形
成したうえ、センサーの長手方向に厚みの均一なガラス
パイプを被着し、必要に応じてこれに加熱溶融等の適宜
手段を施して、厚みが均一な絶縁性保護被覆（６）′を
密着形成することにより、実質的て均一な応答性を示し
、時定数のげらつぎも小さい、優れた７感熱型流体検出
用でンサーであると同時に感温抵抗体としても使用し得
るガラスパイプ被６Ｅ型センサーを提供するものである
。Means for Solving Problem C] The present invention was made in order to eliminate the above-mentioned defects in the conventional heat-sensitive fluid detection sensor. 2) Spiral groove (5)
] is formed using a suitable method, for example, the laser 'jrl construction method, and then a glass pipe of uniform thickness is attached in the longitudinal direction of the sensor, and if necessary, a suitable means such as heating and melting is applied to this. By closely forming an insulating protective coating (6)' with a uniform thickness, it exhibits substantially uniform response and has small fluctuations in time constant, making it an excellent 7 heat-sensitive fluid detection sensor. At the same time, the present invention provides a 6E-type sensor covered with a glass pipe that can be used as a temperature-sensitive resistor.
第２図は、第１図に示す従来公知の感兆型流体検出用セ
ンサーと対照的に、この発明に係るガラスパイプ被覆型
センサーの実施例を模式化して示したものであって、図
中（６）′がガラスパイプの加熱溶融等の適宜方法によ
って形成した実質的に厚みの均一な絶縁性保護被覆を示
すほか、その余の符号は第１図（４−示すものと基本的
に同一である。FIG. 2 schematically shows an embodiment of the glass pipe covered type sensor according to the present invention, in contrast to the conventionally known symptom-type fluid detection sensor shown in FIG. (6)' indicates an insulating protective coating of substantially uniform thickness formed by heating and melting a glass pipe or other appropriate method, and the remaining symbols are basically the same as those shown in Figure 1 (4-). It is.
この実施例に於ては、白金の温度依存４／−Ｆ、抵抗膜
（２）にレーザーによって螺旋状の＃４ Ｆ５＋を形成
したリード付の素子を、ＮＥＧ製のＬＧ−１６ガラスパ
イプで被覆し、これを７５０Ｃで加熱溶融すること罠よ
ってぐ碌性保護破（グ（６）を形成しである。In this example, a leaded element with a temperature-dependent platinum 4/-F resistive film (2) formed with a spiral #4 F5+ by laser is covered with an LG-16 glass pipe made by NEG. Then, by heating and melting this at 750C, a durable protective crack (6) is formed.
なお、従来公知の感熱型流体検出用センサーと、それと
同一規格のこの発明に係る上記実施例との特性上の差異
を実験的に確かめたところ、下記第１表に示すとおりの
顕著な結果が得られ、この発明に係ろガラスパイプ被［
′ａ型センサーの極めて優れた効果が実証されている。In addition, when we experimentally confirmed the difference in characteristics between the conventionally known heat-sensitive fluid detection sensor and the above-mentioned embodiment according to the present invention, which has the same standard, we found remarkable results as shown in Table 1 below. According to the present invention, a filter glass pipe covered [
The extremely excellent effectiveness of the 'a-type sensor has been demonstrated.
因みに、第１表は、静止空気中に於ける試讐センサーの
熱時定数（９０％）を確認したものであって、同表中の
各数値は、従来公知の試料センサー合計４個及びこの発
明に係る試料センサー合計４個の各熱時定数（９０％）
の測定結果を示すものであり、またその測定方法は、別
途第３図のグラフに示すとおりである。Incidentally, Table 1 confirms the thermal time constant (90%) of the sample sensor in still air, and each value in the table is for a total of 4 conventionally known sample sensors and this Each thermal time constant (90%) of a total of 4 sample sensors according to the invention
This shows the measurement results, and the measurement method is as shown separately in the graph of FIG.
この測定結果によれば、従来公知の試料センサーの熱時
定数（９０％）が５．１８秒から６．１０秒までの広い
範囲に分散しているのに対し、この発明に係る試料セン
サーの熱時定数は５．７０秒から５．９０秒という極め
て狭い範囲に世中していることを明らかに看取し得る。According to the measurement results, the thermal time constant (90%) of the conventionally known sample sensor is dispersed over a wide range from 5.18 seconds to 6.10 seconds, whereas the thermal time constant (90%) of the sample sensor according to the present invention is It can be clearly seen that the thermal time constant is within an extremely narrow range of 5.70 seconds to 5.90 seconds.
第１表
静止空気中に於ける熱時定数（９０％）の比較〔この発
明の効果〕
従来の感熱型流体検出用センサーに於てはコーテイング
膜（６）の厚みが不均一となるところから、応答性が不
均一となり、時定数′／ｃ′ｉ〕ばらつきを生ずると共
に、コーテイング膜１６）の形成にも困難を伴うといつ
欠陥が避は難かったが、この発明では、ガラスパイプを
ｖｔ、覆し、必要に応じてこれに加熱溶融等の適宜手段
を施すこと（よって厚みの一定な絶縁性保護被覆（６）
′を形成することで、感熱型流体検出用センサーとして
これを使用する場合には応答性が均一であり且つ時定数
のばらつきも抑…１１出来ろとい５堕めて優れた効果を
有すると共に、一般用途の感温抵抗体として使用した場
合にも有用なセンサーを極めて容易に実現することが可
能である。Table 1 Comparison of thermal time constants (90%) in still air [Effects of this invention] This is because the thickness of the coating film (6) is non-uniform in conventional heat-sensitive fluid detection sensors. , the response becomes non-uniform, the time constant '/c'i] varies, and it is difficult to form the coating film 16), making it difficult to avoid defects. However, in this invention, the glass pipe can be , cover it, and if necessary, apply appropriate means such as heating and melting to it (thus, an insulating protective coating with a constant thickness (6)
' By forming this, when used as a heat-sensitive fluid detection sensor, the response is uniform and the variation in time constant is suppressed. It is possible to extremely easily realize a sensor that is useful even when used as a temperature-sensitive resistor for general purposes.
第１図は、従来公知のコーティング層（６）を有する感
熱型流体検出用センサーの構造図、第２ｐ、／ｌは、ガ
ラスパイプを被覆し、必要に応じてこれに加熱溶融等の
適宜手段な流動こと罠よって絶縁性保ｄ口ｒ ａ ＋ｓ
＋’を形成したことを特徴とするこの発明に係るガラス
パイプ被覆型センサーの実、効例の構造図をそとそれ示
１−１両図中の各符号は次の各構成を示す、。
（１１： 絶縁性基体
（２）： 温度依存性抵抗膜
（３）：リード
（４）： 導伝性ペースト
（５）： 螺旋状溝
（６）： コーテイング膜（第１図）＋６＋’ ：
ガラスバイブ絶縁性保護被覆（第２図）第３図は、
第１表に於ける熱時定Ｆｉ（９０％）の測定方法を示す
グラフである。Fig. 1 is a structural diagram of a heat-sensitive fluid detection sensor having a conventionally known coating layer (6), and Fig. 2p and /l show a glass pipe coated with a glass pipe and, if necessary, an appropriate means such as heating and melting. Due to the flow and trap, the insulating hole r a +s
1-1 The reference numerals in both figures indicate the following structures. (11: Insulating substrate (2): Temperature-dependent resistance film (3): Lead (4): Conductive paste (5): Spiral groove (6): Coating film (Figure 1) +6+':
Glass vibe insulating protective coating (Figure 2) Figure 3 is as follows:
2 is a graph showing a method for measuring thermal time constant Fi (90%) in Table 1.
Claims (2)
依存性抵抗膜を有し、該温度依存性抵抗膜の表面にガラ
スパイプの絶縁性保護被覆を有することを特徴とするガ
ラスパイプ被覆型センサー。(1) A glass characterized by having a temperature-dependent resistive film with spiral grooves formed on the surface of an insulating substrate, and having an insulating protective coating of a glass pipe on the surface of the temperature-dependent resistive film. Pipe-covered sensor.
該温度依存性抵抗膜に螺旋状の溝を形成した後、該螺旋
状の溝を有する温度依存性抵抗膜の表面にガラスパイプ
を密着被覆することによつて絶縁性保護被覆を形成する
ことを特徴とするガラスパイプ被覆型センサーの製造方
法。(2) A temperature-dependent resistance film is deposited on the surface of the insulating substrate,
After forming a spiral groove in the temperature-dependent resistance film, an insulating protective coating is formed by closely covering the surface of the temperature-dependent resistance film having the spiral groove with a glass pipe. A manufacturing method for a glass pipe covered sensor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61187858A JPS6344125A (en) | 1986-08-12 | 1986-08-12 | Glass pipe sheathing type sensor |
| CA000544245A CA1320311C (en) | 1986-08-12 | 1987-08-11 | Process for producing dry -l-aspartyl-l-phenylalanine methyl ester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61187858A JPS6344125A (en) | 1986-08-12 | 1986-08-12 | Glass pipe sheathing type sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6344125A true JPS6344125A (en) | 1988-02-25 |
Family
ID=16213444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61187858A Pending JPS6344125A (en) | 1986-08-12 | 1986-08-12 | Glass pipe sheathing type sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6344125A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6309668B1 (en) | 1994-02-01 | 2001-10-30 | Aventis Pharma Limited | Abuse resistant tablets |
-
1986
- 1986-08-12 JP JP61187858A patent/JPS6344125A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6309668B1 (en) | 1994-02-01 | 2001-10-30 | Aventis Pharma Limited | Abuse resistant tablets |
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