JPS6344018B2 - - Google Patents
Info
- Publication number
- JPS6344018B2 JPS6344018B2 JP56090652A JP9065281A JPS6344018B2 JP S6344018 B2 JPS6344018 B2 JP S6344018B2 JP 56090652 A JP56090652 A JP 56090652A JP 9065281 A JP9065281 A JP 9065281A JP S6344018 B2 JPS6344018 B2 JP S6344018B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- insulating film
- sides
- conductive layer
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 14
- 239000012717 electrostatic precipitator Substances 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 2
- 239000003973 paint Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- H01L29/518—
-
- H01L29/4933—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28211—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a gaseous ambient using an oxygen or a water vapour, e.g. RTO, possibly through a layer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electrostatic Separation (AREA)
- Semiconductor Memories (AREA)
Description
【発明の詳細な説明】
本発明は、主として空気清浄のために使用する
電気集塵装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrostatic precipitator mainly used for air cleaning.
従来、電気集塵装置における集塵部には、第１
図に示すように、帯状の紙またはプラスチツクな
どの絶縁フイルム１の片面中央部に沿つて導電性
塗料が適当な幅に塗布されて導電層２が形成さ
れ、該導電層２の一方の端部中央部を絶縁フイル
ム１の端縁まで延長した通電部３を設け、絶縁フ
イルム１の両側縁には凹凸をつけた絶縁部４を設
けて電極板５を構成し、該電極板５の複数枚を積
層して、各通電部３が交互に逆位置になるように
外枠に収納した構造のものがある。 Conventionally, the dust collection section of an electrostatic precipitator has a first
As shown in the figure, a conductive paint is applied to an appropriate width along the center of one side of an insulating film 1 such as a strip of paper or plastic to form a conductive layer 2, and one end of the conductive layer 2 A current-carrying part 3 is provided whose central part extends to the edge of the insulating film 1, and insulating parts 4 with unevenness are provided on both sides of the insulating film 1 to constitute an electrode plate 5, and a plurality of electrode plates 5 are provided. There is a structure in which the electrically conductive parts 3 are stacked and housed in an outer frame so that the respective current-carrying parts 3 are alternately placed in opposite positions.
しかしながら、上記構成の集電部においては、
複数枚の電極板５の各通電部３が交互に逆位置に
なるように配置して積層を行うという作業が必要
であり、またその際導電層を塗つた面が向き合わ
ないように注意する必要があるという欠点があつ
た。 However, in the current collector section with the above configuration,
It is necessary to stack a plurality of electrode plates 5 by arranging them so that the conductive parts 3 of the electrode plates 5 are alternately placed in opposite positions, and at this time, care must be taken to ensure that the surfaces coated with conductive layers do not face each other. There was a drawback that there was.
本発明は上記点に鑑みてなされたもので、一枚
の絶縁フイルムの中央部に導電層を所定の間隔を
おいて両面に交互に露出するように設けると共
に、前記絶縁フイルムの両側部には絶縁部となる
凹凸部を設けた電極板を形成し、該電極板を前記
所定の間隔ごとに向きを変えて折り曲げ、積層状
態にし、前記導電層には互に異なる極性になるよ
うに直流高電圧電源を接続して集塵部を構成する
ことにより、集塵部の組付作業性を向上させ、誤
つた組付の低減をはかることができるような電気
集塵装置を提供することを目的とするものであ
る。 The present invention has been made in view of the above points, and includes providing conductive layers in the center of one insulating film so as to be exposed alternately on both sides at a predetermined interval, and on both sides of the insulating film. An electrode plate with uneven parts serving as an insulating part is formed, and the electrode plate is turned and bent at the predetermined intervals to form a laminated state. The purpose of the present invention is to provide an electrostatic precipitator that can improve the workability of assembling the dust collector and reduce the number of incorrect assemblies by configuring the dust collector by connecting a voltage power source. That is.
以下本発明を図に示す実施例について説明す
る。第２図は、本発明装置に使用する集塵を構成
する電極板６の一部を切欠いた平面図、第３図は
同じ電極板６の縦断面図である。これらの図に示
すような電極板６には、帯状のプラスチツクなど
の絶縁フイルム７の中央部に沿つて導電性塗料が
適当な幅に所定の間隔をおいて表と裏に交互に塗
布され、これにより導電層８が複数箇所に設けら
れている。これらのそれぞれの導電層８は、その
一方の端部が中央部を延長して、通電部９が形成
されている。そして、この通電部９は、第５図に
示すように折り曲げられた際、周囲に切り込みが
絶縁フイルム７からとび出すように入れ、さらに
絶縁フイルム７の両側縁に沿つて適当な凹凸をつ
けた絶縁部１０が設けられている。 The present invention will be described below with reference to embodiments shown in the drawings. FIG. 2 is a partially cutaway plan view of the electrode plate 6 constituting the dust collector used in the apparatus of the present invention, and FIG. 3 is a longitudinal sectional view of the same electrode plate 6. On the electrode plate 6 as shown in these figures, conductive paint is alternately applied to the front and back sides of an appropriate width at predetermined intervals along the center of an insulating film 7 such as a strip of plastic. As a result, the conductive layer 8 is provided at a plurality of locations. One end of each of these conductive layers 8 extends from the center to form a current-carrying portion 9. Then, as shown in FIG. 5, when this current-carrying part 9 is bent, a notch is made around the insulating film 7 so that it protrudes from the insulating film 7, and appropriate irregularities are made along both side edges of the insulating film 7. An insulating section 10 is provided.
上記構成の電極板６は、第４図に示すように前
記所定の間隔をおいて向きを変えて曲げられるこ
とにより折りたたまれて積層状態にされ、樹脂等
の絶縁板からなる外枠１１に収納される。折りた
たまれた際両側に飛び出した通電部９は、それぞ
れ共通に電極板１２，１３に接続され、該電極板
１２，１３にそれぞれ直流高電圧電源１４の正極
および負極が接続されて、集塵部１５を構成す
る。また、電極板６には折りたたみやすいように
折り目をつけておくとよい。そして、電極板１
２，１３は外枠１１の左右側面の一部に設けられ
ている。 As shown in FIG. 4, the electrode plate 6 having the above structure is folded into a laminated state by changing its direction at the predetermined intervals and bending, and is housed in an outer frame 11 made of an insulating plate made of resin or the like. be done. The current-carrying parts 9 that protrude on both sides when folded are connected in common to electrode plates 12 and 13, respectively, and the positive and negative electrodes of a DC high voltage power supply 14 are connected to the electrode plates 12 and 13, respectively. 15. Further, it is preferable to provide the electrode plate 6 with creases so that it can be easily folded. And electrode plate 1
2 and 13 are provided on part of the left and right side surfaces of the outer frame 11.
上記構成の集塵部１５は、例えば第６図に示す
ように、空気流入側に帯電部１６とプレフイルタ
１７を順次設け、空気流出側には活性炭フイルタ
１８、送風機１９を順次設けることにより電気集
塵装置を構成することができる。 For example, as shown in FIG. 6, the dust collecting section 15 having the above structure is configured to collect electricity by sequentially providing a charging section 16 and a pre-filter 17 on the air inflow side, and sequentially providing an activated carbon filter 18 and a blower 19 on the air outflow side. A dust device can be configured.
この電気集塵装置においては、送風機１９を駆
動して、粒子を含む空気などを矢印方向に流す
と、粒子が荷電部１６を通る過程で、荷電された
後、集塵部１５の電極板６間でクーロン力を受け
て電極板６の板面に捕集される。 In this electrostatic precipitator, when the blower 19 is driven to flow air containing particles in the direction of the arrow, the particles are charged in the process of passing through the charging section 16, and then the electrode plate 6 of the dust collecting section 15 is charged. The particles are collected on the surface of the electrode plate 6 by a Coulomb force between them.
なお、上記実施例に用いた電極板６の両側縁の
絶縁部１０の凹凸は、折りたたんだ際凹凸がかみ
合つたり、凹凸の間隔が長すぎて、電極板６の相
隣り合う面がたわんで接触することがなければ、
どのような形状、間隔で設けてもよい。 Note that the unevenness of the insulating portion 10 on both sides of the electrode plate 6 used in the above embodiment may cause the unevenness to interlock with each other when folded, or the interval between the unevenness may be too long, causing the adjacent surfaces of the electrode plate 6 to bend. If there is no contact with
They may be provided in any shape and at any spacing.
また、上記実施例では通電部９が第５図に示す
ように飛び出すように切り込みを入れたが、切り
込みを入れずに通電部９が電極板１２，１３に接
触するような構造にしてもよい。 Further, in the above embodiment, a cut was made so that the current-carrying part 9 would protrude as shown in FIG. 5, but the structure may be such that the current-carrying part 9 contacts the electrode plates 12 and 13 without making a cut. .
さらに、上記実施例では電極板６が絶縁フイル
ム７に導電性塗料を塗布することにより形成され
る例を示したが、導電性塗料の代りに金属を蒸着
させたり、金属箔を貼着するなどして導電層を形
成してもよい。 Further, in the above embodiment, the electrode plate 6 is formed by applying conductive paint to the insulating film 7, but instead of the conductive paint, metal may be vapor-deposited, metal foil may be pasted, etc. A conductive layer may also be formed.
以上述べたように本発明の電気集塵装置におい
ては、一枚の絶縁フイルムの中央部に導電層を所
定の間隔をおいて両面に交互に露出するように設
けると共に、前記絶縁フイルムの両側部には絶縁
部となる凹凸部を設けた電極板を形成し、該電極
板を前記所定の間隔ごとに向きを変えて折り曲
げ、積層状態にし、前記導電層には互に異なる極
性になるように直流高電圧電源を接続することに
より集塵部を構成したので、集塵部組付の作業性
を向上させ、さらに組付の誤りを低減させること
ができるという優れた効果がある。 As described above, in the electrostatic precipitator of the present invention, conductive layers are provided in the center of one insulating film so as to be exposed alternately on both sides at predetermined intervals, and conductive layers are provided on both sides of the insulating film. An electrode plate having a concave and convex portion serving as an insulating part is formed, and the electrode plate is bent by changing the direction at the predetermined intervals to form a laminated state. Since the dust collecting section is configured by connecting a DC high voltage power source, there is an excellent effect that workability in assembling the dust collecting section can be improved and assembly errors can be reduced.
第１図は従来の電気集塵装置における集塵部を
構成する電極板の斜視図、第２図は本発明の電気
集塵装置に用いる集塵部を構成する電極板の一部
を切り欠いた平面図、第３図は第２図の電極板の
縦断面図、第４図は本発明装置に用いる集塵部の
概略断面図、第５図は第２図の電極板の折り目部
分の拡大斜視図、第６図は本発明の電気集塵装置
の概略図である。
６……電極板、７……絶縁フイルム、８……導
電層、９……通電部、１０……絶縁部、１４……
直流高電圧電源、１５……集塵部。
FIG. 1 is a perspective view of an electrode plate constituting a dust collecting section in a conventional electrostatic precipitator, and FIG. 2 is a partially cutaway view of an electrode plate constituting a dust collecting section used in the electrostatic precipitator of the present invention. FIG. 3 is a longitudinal sectional view of the electrode plate shown in FIG. 2, FIG. 4 is a schematic sectional view of the dust collecting section used in the device of the present invention, and FIG. 5 is a view of the folded portion of the electrode plate shown in FIG. The enlarged perspective view, FIG. 6, is a schematic diagram of the electrostatic precipitator of the present invention. 6... Electrode plate, 7... Insulating film, 8... Conductive layer, 9... Current carrying part, 10... Insulating part, 14...
DC high voltage power supply, 15...dust collection section.
Claims (1)
定の間隔をおいて両面に交互に露出するように設
けると共に、前記絶縁フイルムの両側部には絶縁
部となる凹凸部を設けた電極板を形成し、該電極
板を前記所定の間隔ごとに向きを変えて折り曲
げ、積層状態にし、前記導電層には互に異なる極
性になるように直流高電圧電源を接続することに
より集塵部を構成したことを特徴とする電気集塵
装置。1. An electrode plate in which a conductive layer is provided in the center of a single insulating film so as to be exposed alternately on both sides at a predetermined interval, and uneven parts serving as insulating parts are provided on both sides of the insulating film. The dust collecting section is formed by forming a layer, bending the electrode plates by changing the direction at the predetermined intervals, forming a stacked state, and connecting a DC high voltage power source to the conductive layer so that the polarity is different from each other. An electrostatic precipitator characterized by comprising:
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56090652A JPS57207556A (en) | 1981-06-12 | 1981-06-12 | Electric dust collector |
| FR8209135A FR2506989B1 (en) | 1981-06-12 | 1982-05-26 | SEMICONDUCTOR MEMORY DEVICE |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56090652A JPS57207556A (en) | 1981-06-12 | 1981-06-12 | Electric dust collector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57207556A JPS57207556A (en) | 1982-12-20 |
| JPS6344018B2 true JPS6344018B2 (en) | 1988-09-02 |
Family
ID=14004443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56090652A Granted JPS57207556A (en) | 1981-06-12 | 1981-06-12 | Electric dust collector |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS57207556A (en) |
| FR (1) | FR2506989B1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2555364B1 (en) * | 1983-11-18 | 1990-02-02 | Hitachi Ltd | METHOD FOR MANUFACTURING CONNECTIONS OF A DEVICE WITH INTEGRATED SEMICONDUCTOR CIRCUITS INCLUDING IN PARTICULAR A MITSET |
| JPH01174056U (en) * | 1988-05-30 | 1989-12-11 | ||
| JPH01174057U (en) * | 1988-05-30 | 1989-12-11 | ||
| CN107185713B (en) * | 2017-06-15 | 2019-02-26 | 柳州市北部科技服务有限公司 | A kind of household electrostatic dedusting adornment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2815605C3 (en) * | 1978-04-11 | 1981-04-16 | Siemens AG, 1000 Berlin und 8000 München | Semiconductor memory with control lines of high conductivity |
-
1981
- 1981-06-12 JP JP56090652A patent/JPS57207556A/en active Granted
-
1982
- 1982-05-26 FR FR8209135A patent/FR2506989B1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57207556A (en) | 1982-12-20 |
| FR2506989A1 (en) | 1982-12-03 |
| FR2506989B1 (en) | 1985-06-21 |
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