JPS6343422U - - Google Patents
Info
- Publication number
- JPS6343422U JPS6343422U JP13621286U JP13621286U JPS6343422U JP S6343422 U JPS6343422 U JP S6343422U JP 13621286 U JP13621286 U JP 13621286U JP 13621286 U JP13621286 U JP 13621286U JP S6343422 U JPS6343422 U JP S6343422U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- semiconductor device
- device manufacturing
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims description 2
- 239000000835 fiber Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000012774 insulation material Substances 0.000 description 2
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13621286U JPS6343422U (cs) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13621286U JPS6343422U (cs) | 1986-09-04 | 1986-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343422U true JPS6343422U (cs) | 1988-03-23 |
Family
ID=31039120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13621286U Pending JPS6343422U (cs) | 1986-09-04 | 1986-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343422U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |
| JP2009253179A (ja) * | 2008-04-10 | 2009-10-29 | Koyo Thermo System Kk | 横型炉装置 |
-
1986
- 1986-09-04 JP JP13621286U patent/JPS6343422U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |
| JP2009253179A (ja) * | 2008-04-10 | 2009-10-29 | Koyo Thermo System Kk | 横型炉装置 |