JPS6342366A - 線材を蒸着処理するための装置 - Google Patents

線材を蒸着処理するための装置

Info

Publication number
JPS6342366A
JPS6342366A JP17388187A JP17388187A JPS6342366A JP S6342366 A JPS6342366 A JP S6342366A JP 17388187 A JP17388187 A JP 17388187A JP 17388187 A JP17388187 A JP 17388187A JP S6342366 A JPS6342366 A JP S6342366A
Authority
JP
Japan
Prior art keywords
wire
wire rods
vapor deposition
rollers
guided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17388187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413423B2 (enrdf_load_stackoverflow
Inventor
Ieshiyu Giyunteru
ギユンテル・イエシユ
Kiyuun Geruharuto
ゲルハルト・キユーン
Zenfu Yoahimu
ヨアヒム・ゼンフ
Fuerusuteru Haari
ハーリ・フエルステル
Shiyumitsuto Horusuto
ホルスト・シユミツト
Marukofu Herumuuto
ヘルムート・マルコフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUJI IND KK
Original Assignee
FUJI IND KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUJI IND KK filed Critical FUJI IND KK
Publication of JPS6342366A publication Critical patent/JPS6342366A/ja
Publication of JPH0413423B2 publication Critical patent/JPH0413423B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP17388187A 1986-08-07 1987-07-14 線材を蒸着処理するための装置 Granted JPS6342366A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD23C/293489-7 1986-08-07
DD29348986A DD252009A1 (de) 1986-08-07 1986-08-07 Einrichtung zum bedampfen von draht

Publications (2)

Publication Number Publication Date
JPS6342366A true JPS6342366A (ja) 1988-02-23
JPH0413423B2 JPH0413423B2 (enrdf_load_stackoverflow) 1992-03-09

Family

ID=5581726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17388187A Granted JPS6342366A (ja) 1986-08-07 1987-07-14 線材を蒸着処理するための装置

Country Status (2)

Country Link
JP (1) JPS6342366A (enrdf_load_stackoverflow)
DD (1) DD252009A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2268192A (en) * 1991-02-13 1994-01-05 Secr Defence Matrix-coated reinforcement for production of metal matrix composites
WO2005028696A1 (ja) * 2003-09-16 2005-03-31 Sumitomo Electric Industries, Ltd. 薄膜の製造方法ならびに薄膜線材の製造方法およびパルスレーザ蒸着装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011030305A2 (en) * 2009-09-09 2011-03-17 Cochlear Limited An insulated conductive element having a substantially continuous barrier layer formed through multiple coatings
US8726492B2 (en) 2009-09-09 2014-05-20 Cochlear Limited Insulated conductive element having a substantially continuous barrier layer formed through multiple coatings

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2268192A (en) * 1991-02-13 1994-01-05 Secr Defence Matrix-coated reinforcement for production of metal matrix composites
GB2268192B (en) * 1991-02-13 1994-09-07 Secr Defence Matrix-coated reinforcement for production of metal matrix composites
WO2005028696A1 (ja) * 2003-09-16 2005-03-31 Sumitomo Electric Industries, Ltd. 薄膜の製造方法ならびに薄膜線材の製造方法およびパルスレーザ蒸着装置

Also Published As

Publication number Publication date
JPH0413423B2 (enrdf_load_stackoverflow) 1992-03-09
DD252009A1 (de) 1987-12-02

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