JPS6342136A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS6342136A
JPS6342136A JP61186314A JP18631486A JPS6342136A JP S6342136 A JPS6342136 A JP S6342136A JP 61186314 A JP61186314 A JP 61186314A JP 18631486 A JP18631486 A JP 18631486A JP S6342136 A JPS6342136 A JP S6342136A
Authority
JP
Japan
Prior art keywords
pads
layer
chip
wiring
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61186314A
Other languages
English (en)
Inventor
Mikio Bessho
別所 幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61186314A priority Critical patent/JPS6342136A/ja
Publication of JPS6342136A publication Critical patent/JPS6342136A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54473Marks applied to semiconductor devices or parts for use after dicing
    • H01L2223/5448Located on chip prior to dicing and remaining on chip after dicing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/05599Material
    • H01L2224/056Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/05617Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/05624Aluminium [Al] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8512Aligning
    • H01L2224/85121Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors
    • H01L2224/8513Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors using marks formed on the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体装置に関し、特にゲートアレイ品種の半
導体装置に関する。
〔従来の技術〕
従来、この種の半導体装置は、1ゲ一トアレイ品種が有
する最多のパッケージビン数のパッドをチップが有して
いた。そして、それ以下のパッケージビン数のものに対
しては任意のパッドを選んで外部端子に接続していた。
第2図及び第3図はそれぞれ従来の半導体装置の第1及
び第2の例の平面図である。
第2図及び第3図において、1は電極引出し用のパッド
、3′及び3″はチップ、4は外部端子、5は導線であ
る。
第2図に示す第1の例は、Aパッケージへの正しい接続
、第3図に示す第2の例はBパッケージへの正しい接続
である。
このように、使用するパッケージにより、同一配置のパ
ッドのうち使用するパッドが異なるので、第4図に示す
ように、第2図に示す接続を誤って接続することがあっ
た。
〔発明が解決しようとする問題点〕
上述した従来の半導体装置は、同一配置の同一形状をし
た複数のパッドから任意のパッドを選んで外部端子に接
続するので、配線誤りをするという欠点がある。
本発明の目的は、配線誤りの発生を防止できる半導体装
置を提供することにある。
〔問題点を解決するための手段〕
本発明の半導体装置は、半導体集積回路に搭載するチッ
プと、該チップに設けられる電極引出し用の複数のパッ
ドと、該パッドのうち外部端子に接続すべきパッドの近
傍に設けた認識マークとを含んで構成される。
〔実施例〕
次に、本発明の実施例について図面を参照して説明する
第1図は本発明の一実施例の平面図である。
第1図において、1は電極引出し用のパッド。
2は認識マーク、3はチップ、4は外部端子、5はパッ
ドと外部端子を接続する導線である。
このように、還定されたパッド1の近傍に認識マーク2
を付加することにより、間違ったパッドに配線すること
を防止できる。
ゲートアレイの場合、パッド1が2層目のアルミニウム
層で形成されているため、認識マーク2も同様に2層目
のアルミニウム層に設けることにより、製造工程の拡散
プロセスを変更すること無く、簡単に適用できる。
〔発明の効果〕
以上説明したように本発明の半導体装置は、外部端子と
接続すべきパッドに認識マークを設けることにより、配
線誤りを防止できるという効果がある。
【図面の簡単な説明】
第1図は本発明の一実施例の平面図、第2図及び第3図
はそれぞれ従来の半導体装置の第1及び第2の例の平面
図、第4図は第2図の半導体装置の配線誤りの状態を示
す平面図である。 1・・・パッド、2・・・認識マーク、3.3’、3”
・・・チップ、4・・・外部端子、5・・・導線。 $  、i’  I!] χ 2 図 梯 4 図

Claims (1)

    【特許請求の範囲】
  1. 半導体集積回路に搭載するチップと、該チップに設けら
    れる電極引出し用の複数のパッドと、該パッドのうち外
    部端子に接続すべきパッドの近傍に設けた認識マークと
    を含むことを特徴とする半導体装置。
JP61186314A 1986-08-08 1986-08-08 半導体装置 Pending JPS6342136A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61186314A JPS6342136A (ja) 1986-08-08 1986-08-08 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61186314A JPS6342136A (ja) 1986-08-08 1986-08-08 半導体装置

Publications (1)

Publication Number Publication Date
JPS6342136A true JPS6342136A (ja) 1988-02-23

Family

ID=16186162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61186314A Pending JPS6342136A (ja) 1986-08-08 1986-08-08 半導体装置

Country Status (1)

Country Link
JP (1) JPS6342136A (ja)

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