JPS6341588Y2 - - Google Patents

Info

Publication number
JPS6341588Y2
JPS6341588Y2 JP1986041056U JP4105686U JPS6341588Y2 JP S6341588 Y2 JPS6341588 Y2 JP S6341588Y2 JP 1986041056 U JP1986041056 U JP 1986041056U JP 4105686 U JP4105686 U JP 4105686U JP S6341588 Y2 JPS6341588 Y2 JP S6341588Y2
Authority
JP
Japan
Prior art keywords
exhaust
evacuation
region
objects
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986041056U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61164481U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986041056U priority Critical patent/JPS6341588Y2/ja
Publication of JPS61164481U publication Critical patent/JPS61164481U/ja
Application granted granted Critical
Publication of JPS6341588Y2 publication Critical patent/JPS6341588Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1986041056U 1986-03-20 1986-03-20 Expired JPS6341588Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986041056U JPS6341588Y2 (OSRAM) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986041056U JPS6341588Y2 (OSRAM) 1986-03-20 1986-03-20

Publications (2)

Publication Number Publication Date
JPS61164481U JPS61164481U (OSRAM) 1986-10-13
JPS6341588Y2 true JPS6341588Y2 (OSRAM) 1988-11-01

Family

ID=30550521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986041056U Expired JPS6341588Y2 (OSRAM) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS6341588Y2 (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5820396B2 (ja) * 1975-07-25 1983-04-22 株式会社日立製作所 ハイキベン

Also Published As

Publication number Publication date
JPS61164481U (OSRAM) 1986-10-13

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