JPS6341158U - - Google Patents
Info
- Publication number
- JPS6341158U JPS6341158U JP1986134702U JP13470286U JPS6341158U JP S6341158 U JPS6341158 U JP S6341158U JP 1986134702 U JP1986134702 U JP 1986134702U JP 13470286 U JP13470286 U JP 13470286U JP S6341158 U JPS6341158 U JP S6341158U
- Authority
- JP
- Japan
- Prior art keywords
- light
- mask
- thin film
- distinctive
- identification mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986134702U JPS6341158U (fr) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986134702U JPS6341158U (fr) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6341158U true JPS6341158U (fr) | 1988-03-17 |
Family
ID=31036188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986134702U Pending JPS6341158U (fr) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6341158U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002116533A (ja) * | 2000-10-11 | 2002-04-19 | Dainippon Printing Co Ltd | エリアコード付きフォトマスク用ブランクスとエリアコード付きフォトマスク、およびフォトマスクの製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144829A (ja) * | 1982-02-22 | 1983-08-29 | Hoya Corp | フオトマスクブランクス用基板のマ−キング方法 |
| JPS5915938A (ja) * | 1982-07-19 | 1984-01-27 | Hoya Corp | マ−キングを施されたフオトマスクブランクス用基板 |
-
1986
- 1986-09-02 JP JP1986134702U patent/JPS6341158U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144829A (ja) * | 1982-02-22 | 1983-08-29 | Hoya Corp | フオトマスクブランクス用基板のマ−キング方法 |
| JPS5915938A (ja) * | 1982-07-19 | 1984-01-27 | Hoya Corp | マ−キングを施されたフオトマスクブランクス用基板 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002116533A (ja) * | 2000-10-11 | 2002-04-19 | Dainippon Printing Co Ltd | エリアコード付きフォトマスク用ブランクスとエリアコード付きフォトマスク、およびフォトマスクの製造方法 |