JPS6341116U - - Google Patents
Info
- Publication number
- JPS6341116U JPS6341116U JP1986135101U JP13510186U JPS6341116U JP S6341116 U JPS6341116 U JP S6341116U JP 1986135101 U JP1986135101 U JP 1986135101U JP 13510186 U JP13510186 U JP 13510186U JP S6341116 U JPS6341116 U JP S6341116U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- circuit
- attenuator
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000009966 trimming Methods 0.000 claims 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986135101U JPS6341116U (it) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986135101U JPS6341116U (it) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6341116U true JPS6341116U (it) | 1988-03-17 |
Family
ID=31036969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986135101U Pending JPS6341116U (it) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6341116U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01146387A (ja) * | 1987-12-02 | 1989-06-08 | Tokyo Electron Ltd | 半導体製造装置 |
-
1986
- 1986-09-02 JP JP1986135101U patent/JPS6341116U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01146387A (ja) * | 1987-12-02 | 1989-06-08 | Tokyo Electron Ltd | 半導体製造装置 |