JPS6340744Y2 - - Google Patents
Info
- Publication number
- JPS6340744Y2 JPS6340744Y2 JP10165683U JP10165683U JPS6340744Y2 JP S6340744 Y2 JPS6340744 Y2 JP S6340744Y2 JP 10165683 U JP10165683 U JP 10165683U JP 10165683 U JP10165683 U JP 10165683U JP S6340744 Y2 JPS6340744 Y2 JP S6340744Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- clean room
- cylindrical frame
- ceiling
- performance filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10165683U JPS6010141U (ja) | 1983-06-30 | 1983-06-30 | クリ−ンル−ム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10165683U JPS6010141U (ja) | 1983-06-30 | 1983-06-30 | クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6010141U JPS6010141U (ja) | 1985-01-24 |
JPS6340744Y2 true JPS6340744Y2 (xx) | 1988-10-25 |
Family
ID=30239966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10165683U Granted JPS6010141U (ja) | 1983-06-30 | 1983-06-30 | クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6010141U (xx) |
-
1983
- 1983-06-30 JP JP10165683U patent/JPS6010141U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6010141U (ja) | 1985-01-24 |
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