JPS6339624Y2 - - Google Patents

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Publication number
JPS6339624Y2
JPS6339624Y2 JP15762181U JP15762181U JPS6339624Y2 JP S6339624 Y2 JPS6339624 Y2 JP S6339624Y2 JP 15762181 U JP15762181 U JP 15762181U JP 15762181 U JP15762181 U JP 15762181U JP S6339624 Y2 JPS6339624 Y2 JP S6339624Y2
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JP
Japan
Prior art keywords
gas
front column
fluorocarbon
moisture
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15762181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5862246U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15762181U priority Critical patent/JPS5862246U/ja
Publication of JPS5862246U publication Critical patent/JPS5862246U/ja
Application granted granted Critical
Publication of JPS6339624Y2 publication Critical patent/JPS6339624Y2/ja
Granted legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)
JP15762181U 1981-10-21 1981-10-21 ガスリ−ク測定用組体 Granted JPS5862246U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15762181U JPS5862246U (ja) 1981-10-21 1981-10-21 ガスリ−ク測定用組体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15762181U JPS5862246U (ja) 1981-10-21 1981-10-21 ガスリ−ク測定用組体

Publications (2)

Publication Number Publication Date
JPS5862246U JPS5862246U (ja) 1983-04-26
JPS6339624Y2 true JPS6339624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-18

Family

ID=29950143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15762181U Granted JPS5862246U (ja) 1981-10-21 1981-10-21 ガスリ−ク測定用組体

Country Status (1)

Country Link
JP (1) JPS5862246U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5862246U (ja) 1983-04-26

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