JPS6338320U - - Google Patents
Info
- Publication number
- JPS6338320U JPS6338320U JP1986129560U JP12956086U JPS6338320U JP S6338320 U JPS6338320 U JP S6338320U JP 1986129560 U JP1986129560 U JP 1986129560U JP 12956086 U JP12956086 U JP 12956086U JP S6338320 U JPS6338320 U JP S6338320U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- coating film
- forming apparatus
- resist coating
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129560U JPS6338320U (enExample) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129560U JPS6338320U (enExample) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338320U true JPS6338320U (enExample) | 1988-03-11 |
Family
ID=31026237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986129560U Pending JPS6338320U (enExample) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338320U (enExample) |
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1986
- 1986-08-27 JP JP1986129560U patent/JPS6338320U/ja active Pending