JPH0238727U - - Google Patents
Info
- Publication number
- JPH0238727U JPH0238727U JP1988116931U JP11693188U JPH0238727U JP H0238727 U JPH0238727 U JP H0238727U JP 1988116931 U JP1988116931 U JP 1988116931U JP 11693188 U JP11693188 U JP 11693188U JP H0238727 U JPH0238727 U JP H0238727U
- Authority
- JP
- Japan
- Prior art keywords
- coating
- nozzle
- coating liquid
- rotary
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Nozzles (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988116931U JPH0238727U (enExample) | 1988-09-05 | 1988-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988116931U JPH0238727U (enExample) | 1988-09-05 | 1988-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238727U true JPH0238727U (enExample) | 1990-03-15 |
Family
ID=31359912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988116931U Pending JPH0238727U (enExample) | 1988-09-05 | 1988-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238727U (enExample) |
-
1988
- 1988-09-05 JP JP1988116931U patent/JPH0238727U/ja active Pending