JPS63379A - Manufacture of optical element - Google Patents
Manufacture of optical elementInfo
- Publication number
- JPS63379A JPS63379A JP61142855A JP14285586A JPS63379A JP S63379 A JPS63379 A JP S63379A JP 61142855 A JP61142855 A JP 61142855A JP 14285586 A JP14285586 A JP 14285586A JP S63379 A JPS63379 A JP S63379A
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- adhesive
- film
- alcoholate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000013461 design Methods 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- 239000000853 adhesive Substances 0.000 claims description 27
- 230000001070 adhesive effect Effects 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 16
- 230000007062 hydrolysis Effects 0.000 claims description 7
- 238000006460 hydrolysis reaction Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 4
- 229910052681 coesite Inorganic materials 0.000 abstract description 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 229910052682 stishovite Inorganic materials 0.000 abstract description 3
- 229910052905 tridymite Inorganic materials 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 18
- 239000010408 film Substances 0.000 description 16
- 239000012790 adhesive layer Substances 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- 235000019441 ethanol Nutrition 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 235000007173 Abies balsamea Nutrition 0.000 description 1
- 239000004857 Balsam Substances 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 244000018716 Impatiens biflora Species 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229940099352 cholate Drugs 0.000 description 1
- BHQCQFFYRZLCQQ-OELDTZBJSA-N cholic acid Chemical compound C([C@H]1C[C@H]2O)[C@H](O)CC[C@]1(C)[C@@H]1[C@@H]2[C@@H]2CC[C@H]([C@@H](CCC(O)=O)C)[C@@]2(C)[C@@H](O)C1 BHQCQFFYRZLCQQ-OELDTZBJSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Joining Of Glass To Other Materials (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、光学素子を接着剤としてＳｔ−アルコレート
を用いで貼り合わすことにより光学素子を製造するとき
、接着面に予め８１０２層を設けることにより、接着力
を向上させる方法に関する。Detailed Description of the Invention (Industrial Application Field) The present invention provides a method for manufacturing an optical element by bonding an optical element using St-alcoholate as an adhesive, by providing an 8102 layer in advance on the adhesive surface. The present invention relates to a method for improving adhesive strength.
従来、透過光学系に用いられる光学素子、例えば、レン
ズ、プリズムの接着にはバルサム、エポキシ系、紫外線
硬化型の接着剤が使用されてきた。しかし、これらの接
着剤は接着基体（光学素子）と圧折率が調和しなかった
つ、接着層の厚さが厚くなり過ぎたり、紫外域での透過
率が低いため光学設計が困難となったりして、投＠基体
の選択に制限が加わるというような欠点があった。Conventionally, balsam, epoxy, and ultraviolet curing adhesives have been used to bond optical elements used in transmission optical systems, such as lenses and prisms. However, the refractive index of these adhesives does not match the adhesive substrate (optical element), the thickness of the adhesive layer is too thick, and the transmittance in the ultraviolet region is low, making optical design difficult. However, there were drawbacks such as restrictions on the selection of casting substrates.
（発明が解決しようとする問題点）
そこで、上記欠点を除去するために本発明者は、先に接
着剤としてＳｉ−アルコレートの加水分解生成物を用い
て光学部品を貼り合わせることにより各種の光学素子を
製造する方法を昭和６１年６月１８日イ寸１丈で提案し
た。(Problems to be Solved by the Invention) Therefore, in order to eliminate the above-mentioned drawbacks, the present inventor first bonded optical components together using a hydrolysis product of Si-alcoholate as an adhesive. On June 18, 1985, he proposed a method for manufacturing optical elements in size 1 by 1.
しかし、この発明によっても、例えば５ｉＯｚ％主成分
とする光学素子と、金属や誘電体の薄膜がその表面に成
膜されている光学素子とを接着して光学素子を形成する
場合には、接着面となる薄膜の構成成分の種類や、接着
面の表面粗さの違いにより、時に十分高い接着力が得ら
れないことがあった６本発明は、このような点を改善す
るためになされたものであり、光学素子を製造する場合
に接着剤としてＳｉ−アルコレートを用いるとき、対を
なす接着面の少なくとも一方に５ｉＯｚ層を設けること
によつ、光学素子の光学特性に影響を与えずに、Ｓｉ−
アルコレートによるＷｉ着力を、接着面の表面状態に間
係なく格段に向上させることを目的とする。However, even with this invention, when an optical element is formed by bonding, for example, an optical element containing 5iOz% as a main component and an optical element on which a thin film of metal or dielectric is formed, the adhesive Due to differences in the types of constituent components of the thin film that forms the surface and the surface roughness of the bonding surface, a sufficiently high adhesion force may not be obtained in some cases.6 The present invention was made to improve these points. When using Si-alcoholate as an adhesive when manufacturing optical elements, providing a 5iOz layer on at least one of the pair of bonding surfaces will not affect the optical properties of the optical element. ni, Si-
The purpose is to significantly improve the Wi adhesion strength due to alcoholate without affecting the surface condition of the adhesive surface.
［問題点を解決するためにお手段コ
上記の目的は、光学素子をシリコンアルコレートの加水
分解生成物により接着しで貼り合わす工程を有する光学
素子の製造方法において、該光学素子の接着面となる面
に予め酸化珪素の膜を成膜することにより達成される。[Means to Solve the Problems] The above object is to provide a method for manufacturing an optical element that includes a step of bonding optical elements together by bonding them together using a hydrolyzed product of silicon alcoholate. This is achieved by forming a silicon oxide film on the surface in advance.
［実施例コ
以下、本発明を図面を参照しつつ詳しく説明する。第１
図はＫｒＦ・エキシマ・レーザー用のプリズム・タイプ
の偏光ビーム・スプリッターを示す模式図である。この
偏光ビーム・スフリッターは、多層構造の偏光ビーム・
スプリッター膜３が成膜された７１ノズム１ともう一つ
のプリズム２とが接着剤によつ接＠されて形成されたも
のである。偏光ビーム・スプリッター膜３が表１のよう
な層構成、即ち、高屈折率物質としての１ｒｏ２と低屈
折率物質としての５ｉ０２とが交互に成膜され、その最
外層が２ｒＯｚである層構成の場合には、この偏光ビー
ム・スプリッター膜３が設けられたプリズム１ともう一
つのプリズム２とヲＳｉ−アルコレートの加水分解生成
物で接着しても、その接着力は十分高いとは言い難い、
しかし、本発明の方法により、偏光ビーム・スプリッタ
ーＨ３の最外層を５ｉ０２とした１表２に示されるよう
な層構成とした場合には、Ｓｉ−アルコレートの加水分
解生成物によるプリズム同士の接着力は格段と向上する
。[Example] Hereinafter, the present invention will be explained in detail with reference to the drawings. 1st
The figure is a schematic diagram showing a prism-type polarizing beam splitter for a KrF excimer laser. This polarized beam splitter has a multi-layered polarized beam splitter.
It is formed by connecting a 71 nozzle 1 on which a splitter film 3 is formed and another prism 2 with an adhesive. The polarizing beam splitter film 3 has a layer structure as shown in Table 1, in which 1ro2 as a high refractive index material and 5i02 as a low refractive index material are alternately formed, and the outermost layer is 2rOz. In some cases, even if the prism 1 provided with the polarizing beam splitter film 3 and the other prism 2 are bonded using a hydrolyzed product of Si-alcoholate, the adhesive force is not sufficiently high. ,
However, when using the method of the present invention to create a layer structure as shown in Table 1 in which the outermost layer of the polarizing beam splitter H3 is 5i02, adhesion between the prisms due to the hydrolysis product of Si-alcoholate occurs. Power will improve significantly.
Ｓｔ−アルコレートは種々のものが利用できるけれども
例えばエチルシソケート
Ｓ！−０４（ＯＣＪｓ）＋２等を選択すればよい。ただ
し他にもシリコンテトラエトキサイド： ５ｆ（ＯＣ２
Ｈｓ）４等の５ｉｎＯｎ−＋（ＯＣｄｌｓ）２．、＋２
に代表される５ＩｎＯｎ−＋（ＯＲ）２、−２ （Ｒは
言換または非Ｍ換炭化水素基、ｎは１以上）やＲ，Ｓｔ
（ＯＲ）４−ｎ ＷのＳｉアルコラードが使用できる。Although various St-alcoholates can be used, for example, ethyl sisocate S! -04(OCJs)+2 etc. may be selected. However, there is also silicon tetraethoxide: 5f (OC2
Hs) 4 etc. 5inOn-+ (OCdls) 2. ,+2
5InOn-+(OR)2,-2 (R is a substituted or non-M substituted hydrocarbon group, n is 1 or more) and R, St
(OR)4-nW Si alcolade can be used.
これらはみな高い接着力が得られる。All of these can provide high adhesive strength.
本発明の方法により接着力が向上するのは次のような理
由によるものと考えられる。接着剤である加水分解され
たＳｉ−アルコレートは脱水、重合することにより、Ｓ
ｉｎ、の非晶質膜に変化し、これが接着力を発揮する０
合成石英からなるプリズム２の接着面を構成する成分は
、この非晶質膜とほとんど等しい成分、組成である。一
方、偏光ビーム・スプリッター膜３の設けられたプリズ
ム１の接着面は、表１に示す層構成ではＺｒ０ｚであり
、接着層と同じ酸化物ではあるが、異なる物質であるの
で親和性が弱い。特に’２ｒ０２の表面が粗いと親和力
が弱まり接着力がかなり低下する。しかし、本発明を適
用した表２に示す層構成では、スプリッター膜３が設け
られたプリズム１の最外層がＳｉＯ２となっているので
′ｉｆｉ着層との親和性が格段と向上する。この結果接
着面の表面粗さが多少粗くなっても高い接着力が維持で
きる。The reason why the adhesive strength is improved by the method of the present invention is considered to be as follows. Hydrolyzed Si-alcoholate, which is an adhesive, becomes S by dehydration and polymerization.
in, changes into an amorphous film that exhibits adhesive strength.
The components constituting the adhesive surface of the prism 2 made of synthetic quartz have almost the same components and composition as this amorphous film. On the other hand, the adhesive surface of the prism 1 provided with the polarizing beam splitter film 3 is Zr0z in the layer configuration shown in Table 1, and although it is the same oxide as the adhesive layer, it is a different substance and has weak affinity. In particular, if the surface of '2r02 is rough, the affinity will be weakened and the adhesive force will be considerably reduced. However, in the layer structure shown in Table 2 to which the present invention is applied, since the outermost layer of the prism 1 provided with the splitter film 3 is SiO2, the compatibility with the 'ifi deposition layer is significantly improved. As a result, high adhesive strength can be maintained even if the surface roughness of the adhesive surface becomes somewhat rough.
なお、表１と表２の層構成をもつ偏光ビーム・スプリッ
ターの分光特性を順に第２図、第３図に示す６図中、５
は反射率のＳ成分、６は反射率のＰ成分を表わす曲線で
ある０図より、５ｉＯｚ％付加しても分光特性は変らず
、にｒＦ （入＝２４８）におけるＳ偏光、Ｐ偏光も
完全に分離されている。The spectral characteristics of the polarizing beam splitter having the layer configurations shown in Tables 1 and 2 are shown in Figure 2 and Figure 3 in order.
From Figure 0, where is the curve representing the S component of the reflectance and 6 is the curve representing the P component of the reflectance, the spectral characteristics do not change even when 5 iOz% is added, and the S and P polarization at rF (input = 248) are also completely separated into
本発明の方法においで５１０２層の形成は真空蒸着、ス
パッタリング法、イオンブレーティング法等の成膜法に
よればよい。この５ｉＯｚ層の膜厚は、形成しようとす
る光学素子の光学特性を考慮すると、光学素子の設計基
準波長のｍ／２（ｍ・１．２．３．・・・）倍とすると
よい。In the method of the present invention, the layer 5102 may be formed by a film forming method such as vacuum evaporation, sputtering method, or ion blasting method. Considering the optical characteristics of the optical element to be formed, the thickness of this 5iOz layer is preferably m/2 (m·1.2.3...) times the design standard wavelength of the optical element.
本発明の方法において、Ｓｉ−アルコレートは加水分解
されて使用されるが、加水分解の条件、触媒は特に制限
はなく、常法に従って加水分解を実施すればよい。In the method of the present invention, the Si-alcoholate is used after being hydrolyzed, but the hydrolysis conditions and catalyst are not particularly limited, and the hydrolysis may be carried out according to a conventional method.
加水分解俊には溶媒のアルコール、も［、＜は工ステル
が残留するが、低沸点のアルコール、エステル、（例え
ば、エチルアルコール、硫酸エステル等）は、接着後揮
発する。より積極的にこれを除去するならば、加熱する
か真空にすることで処理できる。また、接着に際して接
着面に、ゴミ、ホコリ等の異物や不純物が存在すると、
接着強度が低下したり、レーザー損傷の原因になること
から、接着においては、接着面を十分クリーニングする
とともに、接着剤を口過して用いるなど、不純物の除去
が必要である。特に作業環境としては、クリーンルーム
が適しでいる。When hydrolyzed, solvent alcohols and esters remain, but low boiling point alcohols and esters (for example, ethyl alcohol, sulfuric esters, etc.) volatilize after adhesion. If you want to remove it more aggressively, you can use heat or vacuum. Also, if there is foreign matter or impurities such as dirt or dust on the bonding surface during bonding,
When adhering, it is necessary to thoroughly clean the adhesion surface and remove impurities, such as by rinsing the adhesive before use, since this may reduce adhesive strength or cause laser damage. A clean room is particularly suitable as a work environment.
本発明において、Ｓｉ−アルコレートの加水分解生成物
を接着しようとする面にコーティングするためには、例
えば貼り合わせ面に滴下、塗布しで接着するなどの一般
的な方法も利用できるが、接着層を１鱗程度にまで薄く
するために次の方法が好適である。即ち、接着しようと
するもの同士を接合し、その隙間にＳｉアルコレートの
加水分解生成物を注射器等を利用しで注入して、毛細管
現象により両レンズの接合面全体にその加水分解生成物
を行き渡らせる方法である。この方法において、Ｓｉ−
アルコレート％ｍ合面上にうまく広げ、かつ膜厚、膜の
形成速度をコントロールするためにはＳｉ−アルコレー
トが適当な粘度を有するように調整することが必要であ
る。これは金属アルコレートを適当に選択した溶液に溶
解することによつ実現できる。この溶液としては、例え
ばブチルアルコール等の高沸点アルコールやエステルが
利用できる。In the present invention, in order to coat the surface to be bonded with the hydrolysis product of Si-alcoholate, general methods such as dripping or coating on the surface to be bonded can be used; The following method is suitable for thinning the layer to about one scale. That is, the objects to be bonded are joined together, and a hydrolyzed product of Si alcoholate is injected into the gap using a syringe, etc., and the hydrolyzed product is spread over the entire bonded surface of both lenses by capillary action. This is a way to spread the word. In this method, Si-
In order to spread the alcoholate %m well on the joint surface and to control the film thickness and film formation rate, it is necessary to adjust the Si-alcoholate so that it has an appropriate viscosity. This can be achieved by dissolving the metal alcoholate in an appropriately selected solution. As this solution, for example, a high boiling point alcohol such as butyl alcohol or an ester can be used.
一股にＳｉ−アル、コレートは、加水分解後、加熱する
ことによって、脱水、重合が進み、光学素子の材質によ
り近いものとなる。しかし、本発明、特にこの実施例で
は、加熱を行なわなくても、接着層は加熱をした場合と
同等の光学的特性を示し且つ実用上十分な接着能を呈す
るので、通常加熱の必要はない。After hydrolysis, Si-al and cholate are heated to proceed with dehydration and polymerization, making them more similar to the material of optical elements. However, in the present invention, especially in this example, even without heating, the adhesive layer exhibits the same optical properties as those with heating, and exhibits practically sufficient adhesion ability, so heating is usually not necessary. .
本発明は上記実施例に限らず、製造品の機能を実用上支
Ｉｌｌない範囲にとどめる限り、光を集光、反射、屈折
、干渉等させる作用を果す任意の光学素子を貼り合わせ
てして形成する各種の光学素子の製造に適用することが
できる。例えば、金属ハーフミラ−のような金属膜が表
面（こ成膜されている光学素子や１表面上に誘電体膜・
金ａ膜が全く成膜されでいない光学素子（例えば５ｉＯ
ｚ以外の酸化物を主成分とするレンズ、プリズムのよう
な光学素子）等を使用して形成する光学素子である。The present invention is not limited to the above-mentioned embodiments, but may include any optical element that functions to condense, reflect, refract, interfere, etc. with light, as long as the function of the manufactured product is kept within a range that is not practical. It can be applied to the manufacture of various optical elements to be formed. For example, a metal film such as a metal half mirror is formed on the surface (an optical element on which this film is formed, or a dielectric film or
Optical elements on which no gold a film is formed (for example, 5iO
This is an optical element formed using an optical element such as a lens or prism whose main component is an oxide other than z.
なお、本発明において、ＳｉＯ□層は必要に応じて対と
なる接着面の両方に設けでもよい。In the present invention, the SiO□ layer may be provided on both of the pair of bonding surfaces, if necessary.
第１表 注：屈折率は波長２４８ｎコのものである６第２表 注：屈折率は波長２４８ｎｍのものである。Table 1 Note: The refractive index is for a wavelength of 248 nm.6Table 2 Note: The refractive index is at a wavelength of 248 nm.
以上詳細に説明したように、接着面となる光学素子の表
面に５ｉ０２層を設け、接着剤にはＳｉ−アルコレート
を用いて光学素子を製造する本発明の方法によって、構
成部品同士の接着力が格段に向上した光学素子が製造で
きる。As explained in detail above, the method of the present invention in which a 5i02 layer is provided on the surface of an optical element that will serve as an adhesive surface, and Si-alcoholate is used as an adhesive to produce an optical element, is used to increase the adhesive strength between component parts. Optical elements with significantly improved properties can be manufactured.
第１図は偏光ビーム・スプリッターの模式断面図、第２
図は第１表に示す層構成の従来の偏光ビーム・スプリッ
ターの分光特性を示す図、第３図は本発明により製造さ
れた、第２表に示す層構成の偏光ビーム・スプリッター
の分光特性を示す図である。
１．２はプリズム、３はプリズム１上に形成された偏光
ビーム・スプリッター膜、４は接着層であるＳｉ−アル
コレート、５は反射率のＳ成分、６はＰ成分である。Figure 1 is a schematic cross-sectional view of a polarizing beam splitter, Figure 2
Figure 3 shows the spectral characteristics of a conventional polarizing beam splitter with the layer configuration shown in Table 1, and Figure 3 shows the spectral characteristics of a polarizing beam splitter manufactured according to the present invention with the layer configuration shown in Table 2. FIG. 1.2 is a prism, 3 is a polarizing beam splitter film formed on the prism 1, 4 is a Si-alcoholate adhesive layer, 5 is an S component of reflectance, and 6 is a P component.
Claims (1)
により接着して貼り合わす工程を有する光学素子の製造
方法において、該光学素子の接着面となる面に予め酸化
珪素の膜を成膜することを特徴とする光学素子の製造方
法。 ２）前記光学素子の表面に誘電体膜または金属膜が成膜
されている特許請求の範囲第１項記載の光学素子の製造
法。 ３）前記酸化珪素の膜の膜厚が該光学素子の設計基準波
長入のｍ／２倍（ｍ＝１、２、３、・・・）である特許
請求の範囲第１項または第２項記載の光学素子の製造法
。[Scope of Claims] 1) A method for manufacturing an optical element, which includes a step of bonding an optical element together using a hydrolysis product of silicon alcoholate, in which a silicon oxide film is preliminarily applied to the adhesive surface of the optical element. A method for manufacturing an optical element, comprising forming a film. 2) The method for manufacturing an optical element according to claim 1, wherein a dielectric film or a metal film is formed on the surface of the optical element. 3) Claim 1 or 2, wherein the thickness of the silicon oxide film is m/2 times (m=1, 2, 3, . . . ) the design reference wavelength of the optical element. Method of manufacturing the optical element described.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61142855A JPS63379A (en) | 1986-06-20 | 1986-06-20 | Manufacture of optical element |
| US08/162,794 US5725626A (en) | 1986-06-18 | 1993-12-07 | Method for manufacturing an optical element by bonding a plurality of elements |
| US08/409,952 US5683480A (en) | 1986-06-18 | 1995-03-23 | Method of bonding two prisms with a hydrolysis product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61142855A JPS63379A (en) | 1986-06-20 | 1986-06-20 | Manufacture of optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63379A true JPS63379A (en) | 1988-01-05 |
| JPH0556789B2 JPH0556789B2 (en) | 1993-08-20 |
Family
ID=15325184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61142855A Granted JPS63379A (en) | 1986-06-18 | 1986-06-20 | Manufacture of optical element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63379A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008567A4 (en) * | 1997-07-23 | 2000-06-14 | Hamamatsu Photonics Kk | Method of bonding glass members |
| WO2016035710A1 (en) * | 2014-09-02 | 2016-03-10 | コニカミノルタ株式会社 | Prism unit and projector |
-
1986
- 1986-06-20 JP JP61142855A patent/JPS63379A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008567A4 (en) * | 1997-07-23 | 2000-06-14 | Hamamatsu Photonics Kk | Method of bonding glass members |
| US6314759B1 (en) | 1997-07-23 | 2001-11-13 | Hamamatsu Photonics K.K. | Method of bonding glass members |
| WO2016035710A1 (en) * | 2014-09-02 | 2016-03-10 | コニカミノルタ株式会社 | Prism unit and projector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0556789B2 (en) | 1993-08-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |