JPS6336694Y2 - - Google Patents
Info
- Publication number
- JPS6336694Y2 JPS6336694Y2 JP7536283U JP7536283U JPS6336694Y2 JP S6336694 Y2 JPS6336694 Y2 JP S6336694Y2 JP 7536283 U JP7536283 U JP 7536283U JP 7536283 U JP7536283 U JP 7536283U JP S6336694 Y2 JPS6336694 Y2 JP S6336694Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- housing
- air filter
- ventilation hole
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000009423 ventilation Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 12
- 239000000835 fiber Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Filters For Electric Vacuum Cleaners (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7536283U JPS59180443U (ja) | 1983-05-18 | 1983-05-18 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7536283U JPS59180443U (ja) | 1983-05-18 | 1983-05-18 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59180443U JPS59180443U (ja) | 1984-12-01 |
| JPS6336694Y2 true JPS6336694Y2 (ko) | 1988-09-28 |
Family
ID=30205429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7536283U Granted JPS59180443U (ja) | 1983-05-18 | 1983-05-18 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59180443U (ko) |
-
1983
- 1983-05-18 JP JP7536283U patent/JPS59180443U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59180443U (ja) | 1984-12-01 |
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