JPS6336032U - - Google Patents
Info
- Publication number
- JPS6336032U JPS6336032U JP13059786U JP13059786U JPS6336032U JP S6336032 U JPS6336032 U JP S6336032U JP 13059786 U JP13059786 U JP 13059786U JP 13059786 U JP13059786 U JP 13059786U JP S6336032 U JPS6336032 U JP S6336032U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- air supply
- semiconductor
- piping
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13059786U JPS6336032U (enExample) | 1986-08-26 | 1986-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13059786U JPS6336032U (enExample) | 1986-08-26 | 1986-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6336032U true JPS6336032U (enExample) | 1988-03-08 |
Family
ID=31028248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13059786U Pending JPS6336032U (enExample) | 1986-08-26 | 1986-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336032U (enExample) |
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1986
- 1986-08-26 JP JP13059786U patent/JPS6336032U/ja active Pending