JPS6294629U - - Google Patents
Info
- Publication number
- JPS6294629U JPS6294629U JP18745185U JP18745185U JPS6294629U JP S6294629 U JPS6294629 U JP S6294629U JP 18745185 U JP18745185 U JP 18745185U JP 18745185 U JP18745185 U JP 18745185U JP S6294629 U JPS6294629 U JP S6294629U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- piping
- cleaning
- gas supply
- wafer cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18745185U JPS6294629U (enExample) | 1985-12-05 | 1985-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18745185U JPS6294629U (enExample) | 1985-12-05 | 1985-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294629U true JPS6294629U (enExample) | 1987-06-17 |
Family
ID=31137941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18745185U Pending JPS6294629U (enExample) | 1985-12-05 | 1985-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294629U (enExample) |
-
1985
- 1985-12-05 JP JP18745185U patent/JPS6294629U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS52102920A (en) | Secondary-air supply system for exhaust gas cleaner | |
| JPS6294629U (enExample) | ||
| GB1401333A (en) | Vacuum cleaning systems | |
| JPH0237736U (enExample) | ||
| JPS6017934U (ja) | 冷却装置 | |
| JPS621735U (enExample) | ||
| JPS63186546U (enExample) | ||
| JPS62114300U (enExample) | ||
| JPS61164027U (enExample) | ||
| JPS6349075U (enExample) | ||
| JPH019151Y2 (enExample) | ||
| JPS61131834U (enExample) | ||
| JPS6264889U (enExample) | ||
| JPH02112774U (enExample) | ||
| JPS6218673U (enExample) | ||
| JPS61140189U (enExample) | ||
| JPH01125549U (enExample) | ||
| JPS6245533U (enExample) | ||
| JPH01195872A (ja) | エアラインマスク | |
| JPS59144175U (ja) | 油吸引装置 | |
| JPH0331U (enExample) | ||
| JPS6292146U (enExample) | ||
| JPS58165434U (ja) | ガス消費配管系の内圧保持装置 | |
| JPS6243615U (enExample) | ||
| JPS62107561U (enExample) |