JPS6336032U - - Google Patents

Info

Publication number
JPS6336032U
JPS6336032U JP13059786U JP13059786U JPS6336032U JP S6336032 U JPS6336032 U JP S6336032U JP 13059786 U JP13059786 U JP 13059786U JP 13059786 U JP13059786 U JP 13059786U JP S6336032 U JPS6336032 U JP S6336032U
Authority
JP
Japan
Prior art keywords
processing chamber
air supply
semiconductor
piping
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13059786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13059786U priority Critical patent/JPS6336032U/ja
Publication of JPS6336032U publication Critical patent/JPS6336032U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP13059786U 1986-08-26 1986-08-26 Pending JPS6336032U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13059786U JPS6336032U (enrdf_load_stackoverflow) 1986-08-26 1986-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13059786U JPS6336032U (enrdf_load_stackoverflow) 1986-08-26 1986-08-26

Publications (1)

Publication Number Publication Date
JPS6336032U true JPS6336032U (enrdf_load_stackoverflow) 1988-03-08

Family

ID=31028248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13059786U Pending JPS6336032U (enrdf_load_stackoverflow) 1986-08-26 1986-08-26

Country Status (1)

Country Link
JP (1) JPS6336032U (enrdf_load_stackoverflow)

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