JPS6294629U - - Google Patents

Info

Publication number
JPS6294629U
JPS6294629U JP18745185U JP18745185U JPS6294629U JP S6294629 U JPS6294629 U JP S6294629U JP 18745185 U JP18745185 U JP 18745185U JP 18745185 U JP18745185 U JP 18745185U JP S6294629 U JPS6294629 U JP S6294629U
Authority
JP
Japan
Prior art keywords
wafer
piping
cleaning
gas supply
wafer cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18745185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18745185U priority Critical patent/JPS6294629U/ja
Publication of JPS6294629U publication Critical patent/JPS6294629U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP18745185U 1985-12-05 1985-12-05 Pending JPS6294629U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18745185U JPS6294629U (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18745185U JPS6294629U (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Publications (1)

Publication Number Publication Date
JPS6294629U true JPS6294629U (enrdf_load_stackoverflow) 1987-06-17

Family

ID=31137941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18745185U Pending JPS6294629U (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Country Status (1)

Country Link
JP (1) JPS6294629U (enrdf_load_stackoverflow)

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