JPS6335598U - - Google Patents
Info
- Publication number
- JPS6335598U JPS6335598U JP12947886U JP12947886U JPS6335598U JP S6335598 U JPS6335598 U JP S6335598U JP 12947886 U JP12947886 U JP 12947886U JP 12947886 U JP12947886 U JP 12947886U JP S6335598 U JPS6335598 U JP S6335598U
- Authority
- JP
- Japan
- Prior art keywords
- robot arm
- resistance layers
- type
- diffused resistance
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12947886U JPS6335598U (un) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12947886U JPS6335598U (un) | 1986-08-27 | 1986-08-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6335598U true JPS6335598U (un) | 1988-03-07 |
Family
ID=31026082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12947886U Pending JPS6335598U (un) | 1986-08-27 | 1986-08-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6335598U (un) |
-
1986
- 1986-08-27 JP JP12947886U patent/JPS6335598U/ja active Pending