JPS6335343Y2 - - Google Patents
Info
- Publication number
- JPS6335343Y2 JPS6335343Y2 JP8616484U JP8616484U JPS6335343Y2 JP S6335343 Y2 JPS6335343 Y2 JP S6335343Y2 JP 8616484 U JP8616484 U JP 8616484U JP 8616484 U JP8616484 U JP 8616484U JP S6335343 Y2 JPS6335343 Y2 JP S6335343Y2
- Authority
- JP
- Japan
- Prior art keywords
- organic solvent
- dried
- solvent vapor
- heating coil
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003960 organic solvent Substances 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000001035 drying Methods 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 8
- 239000000498 cooling water Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 description 10
- 239000002904 solvent Substances 0.000 description 7
- 239000003921 oil Substances 0.000 description 5
- 238000009835 boiling Methods 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8616484U JPS613394U (ja) | 1984-06-12 | 1984-06-12 | 有機溶剤蒸気精密乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8616484U JPS613394U (ja) | 1984-06-12 | 1984-06-12 | 有機溶剤蒸気精密乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS613394U JPS613394U (ja) | 1986-01-10 |
| JPS6335343Y2 true JPS6335343Y2 (enrdf_load_html_response) | 1988-09-20 |
Family
ID=30637215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8616484U Granted JPS613394U (ja) | 1984-06-12 | 1984-06-12 | 有機溶剤蒸気精密乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS613394U (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2511873B2 (ja) * | 1986-04-18 | 1996-07-03 | 株式会社日立製作所 | ベ−パ乾燥装置 |
-
1984
- 1984-06-12 JP JP8616484U patent/JPS613394U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS613394U (ja) | 1986-01-10 |