JPS6334163U - - Google Patents
Info
- Publication number
- JPS6334163U JPS6334163U JP12648386U JP12648386U JPS6334163U JP S6334163 U JPS6334163 U JP S6334163U JP 12648386 U JP12648386 U JP 12648386U JP 12648386 U JP12648386 U JP 12648386U JP S6334163 U JPS6334163 U JP S6334163U
- Authority
- JP
- Japan
- Prior art keywords
- planetary
- annular frame
- shaft
- circular parts
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12648386U JPH0345947Y2 (enExample) | 1986-08-21 | 1986-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12648386U JPH0345947Y2 (enExample) | 1986-08-21 | 1986-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6334163U true JPS6334163U (enExample) | 1988-03-04 |
| JPH0345947Y2 JPH0345947Y2 (enExample) | 1991-09-27 |
Family
ID=31020324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12648386U Expired JPH0345947Y2 (enExample) | 1986-08-21 | 1986-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345947Y2 (enExample) |
-
1986
- 1986-08-21 JP JP12648386U patent/JPH0345947Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345947Y2 (enExample) | 1991-09-27 |