JPS6333630U - - Google Patents
Info
- Publication number
- JPS6333630U JPS6333630U JP12750386U JP12750386U JPS6333630U JP S6333630 U JPS6333630 U JP S6333630U JP 12750386 U JP12750386 U JP 12750386U JP 12750386 U JP12750386 U JP 12750386U JP S6333630 U JPS6333630 U JP S6333630U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- carrier
- semiconductor wafer
- auxiliary jig
- wafer insertion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12750386U JPS6333630U (me) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12750386U JPS6333630U (me) | 1986-08-20 | 1986-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6333630U true JPS6333630U (me) | 1988-03-04 |
Family
ID=31022317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12750386U Pending JPS6333630U (me) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333630U (me) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59224139A (ja) * | 1983-06-03 | 1984-12-17 | Nec Kyushu Ltd | 半導体基板移し替え装置 |
| JPS6052034A (ja) * | 1983-08-31 | 1985-03-23 | Mitsubishi Electric Corp | 半導体ウエハのピツチ変換装置 |
| JPS60249551A (ja) * | 1984-05-25 | 1985-12-10 | Matsushita Electric Works Ltd | ウエハ入替治具 |
-
1986
- 1986-08-20 JP JP12750386U patent/JPS6333630U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59224139A (ja) * | 1983-06-03 | 1984-12-17 | Nec Kyushu Ltd | 半導体基板移し替え装置 |
| JPS6052034A (ja) * | 1983-08-31 | 1985-03-23 | Mitsubishi Electric Corp | 半導体ウエハのピツチ変換装置 |
| JPS60249551A (ja) * | 1984-05-25 | 1985-12-10 | Matsushita Electric Works Ltd | ウエハ入替治具 |