JPS6333123Y2 - - Google Patents

Description

[Detailed description of the invention] The ultrasonic sensor of this invention can be used to measure the shape, displacement, and internal strain of an object, as well as the position and shape of internal organs in the body. It is suitable for measuring objects, and can perform non-contact three-dimensional measurement by combining multiple sensors.In other words, ultrasonic detection elements made of thin films are placed at minute intervals on a substrate made of laminated thin films. They are arranged vertically and horizontally, and the input/output terminals of the ultrasonic detection elements are drawn out separately for each column for each thin film of each layer.

The use of ultrasonic waves for measurement has already been done. For example, an ultrasonic signal emitted from a signal source is transmitted and reflected by an object, and the transmitted and reflected signals are detected on the measurement side to determine the moving speed of the object. to measure,
It also measures the distance to objects.

However, depending on the accuracy of the detector, it is difficult to detect changes in ultrasonic waves unless the object to be measured is of a certain size, and many detectors are unsuitable for measuring small objects.

This invention provides a sensor that can measure even minute objects using ultrasonic waves and is easy to manufacture.Examples will now be described in detail with reference to the drawings.

In the figure, reference numeral 1 denotes a substrate composed of a laminated layer of thin films made of a high dielectric material such as ceramic.

On the surface of this substrate 1, a large number of thin film-like ultrasonic transducers 2, 2', 2'', etc. are installed in rows and columns, with minute intervals of at least millimeters or less. As for the method, if the ultrasonic transducer 2 is printed or vapor-deposited on the substrate 1, a precise one can be obtained and the work is easy.

A pedestal 3 is formed at one end of the substrate 1, and input/output terminals 4, 4', 4'', . . . of the ultrasonic transducers 2, 2', 2'', . …
is now drawn out separately for each column.

Next, to explain how to use and operate, if the object to be measured 5 is installed between the ultrasonic signal transmitter 6 and the substrate 1, the ultrasonic signal emitted from the transmitter 6 will not hit the object to be measured 5 and the substrate 1. Ultrasonic transducer 2 on 1,
2', 2'', . . . and A', which hits the object to be measured 5 and passes through it to reach the vibrators 2, 2', 2'', . . .

The vibrators 2, 2', 2'', . . . vibrate in response to the ultrasonic signal A or A', and serve as detection elements for detecting the difference between the signals A and A'.

By detecting mutual changes in the vibrators 2, 2', 2''..., the thickness and shape of the object to be measured 5 can be determined, and the intervals between the vibrators 2, 2', 2''... Therefore, it is possible to measure even quite small objects.

The operation of the vibrators 2, 2', 2''... is determined by the terminals 4,
4', 4'', etc., it is converted into an electrical signal and sent to an amplifier, computer, etc.

Note that in order to measure the object to be measured 5 three-dimensionally rather than two-dimensionally, it is possible to measure from various angles while moving the ultrasonic transmitter 6, but as shown in FIG. If a plurality of sensors of this invention are used in combination so as to surround the transmitter 5, three-dimensional measurement can be performed even if the transmitter 6 is fixed.

As mentioned above, the ultrasonic sensor of this invention can perform fine-grained measurements without contact when measuring objects, so it is used in measuring instruments for small objects such as parts of precision instruments and electronic devices, and medical diagnostic instruments. It is suitable for use in a combination of multiple devices, and three-dimensional measurement is possible even without contact.
Moreover, even if a large number of ultrasonic detection elements are provided, the input/output terminals can be easily drawn out, and manufacturing work is easy.

[Brief explanation of drawings]

FIG. 1 is an enlarged external perspective view showing an embodiment of the ultrasonic sensor of this invention, and FIG. 2 is an explanatory view showing an example of how to use it. 1...Substrate, 2, 2', 2''...Ultrasonic vibrator,
3...Pedestal, 4,4',4''...Input/output terminal, 5...
...Object to be measured, 6...Ultrasonic transmitter.

Claims (1)

[Claims for Utility Model Registration] (1) Ultrasonic detection elements made of thin films are arranged vertically and horizontally at minute intervals on a substrate made of a laminated layer of thin films, and input/output terminals of the ultrasonic detection elements are arranged for each layer of thin films. An ultrasonic sensor that is characterized by separating and drawing out each row. (2) The ultrasonic sensor according to claim 1, wherein the ultrasonic detection element is an ultrasonic vibrator.