JPS6332983Y2 - - Google Patents

Info

Publication number
JPS6332983Y2
JPS6332983Y2 JP1983148159U JP14815983U JPS6332983Y2 JP S6332983 Y2 JPS6332983 Y2 JP S6332983Y2 JP 1983148159 U JP1983148159 U JP 1983148159U JP 14815983 U JP14815983 U JP 14815983U JP S6332983 Y2 JPS6332983 Y2 JP S6332983Y2
Authority
JP
Japan
Prior art keywords
pressure
accumulator
pump
gas
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983148159U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6056823U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14815983U priority Critical patent/JPS6056823U/ja
Publication of JPS6056823U publication Critical patent/JPS6056823U/ja
Application granted granted Critical
Publication of JPS6332983Y2 publication Critical patent/JPS6332983Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP14815983U 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置 Granted JPS6056823U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14815983U JPS6056823U (ja) 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14815983U JPS6056823U (ja) 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置

Publications (2)

Publication Number Publication Date
JPS6056823U JPS6056823U (ja) 1985-04-20
JPS6332983Y2 true JPS6332983Y2 (enrdf_load_stackoverflow) 1988-09-02

Family

ID=30329261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14815983U Granted JPS6056823U (ja) 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置

Country Status (1)

Country Link
JP (1) JPS6056823U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4594031B2 (ja) * 2004-10-18 2010-12-08 大日本スクリーン製造株式会社 基板保持装置
DE112021004087T5 (de) * 2020-07-30 2023-06-15 Fanuc Corporation Druckfluidzufuhrsystem

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423041Y2 (enrdf_load_stackoverflow) * 1972-06-13 1979-08-09
CH549736A (de) * 1973-06-21 1974-05-31 Sulzer Ag Selbstdruckerzeugendes axial-gasschwebelager.
JPS56138502A (en) * 1980-03-31 1981-10-29 Agency Of Ind Science & Technol Oil pressure servo driving device
JPS57117401U (enrdf_load_stackoverflow) * 1981-01-14 1982-07-21

Also Published As

Publication number Publication date
JPS6056823U (ja) 1985-04-20

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