JPS6332678U - - Google Patents

Info

Publication number
JPS6332678U
JPS6332678U JP12554686U JP12554686U JPS6332678U JP S6332678 U JPS6332678 U JP S6332678U JP 12554686 U JP12554686 U JP 12554686U JP 12554686 U JP12554686 U JP 12554686U JP S6332678 U JPS6332678 U JP S6332678U
Authority
JP
Japan
Prior art keywords
substrate
liquid
spin coating
coating device
spinner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12554686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12554686U priority Critical patent/JPS6332678U/ja
Publication of JPS6332678U publication Critical patent/JPS6332678U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP12554686U 1986-08-19 1986-08-19 Pending JPS6332678U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12554686U JPS6332678U (enrdf_load_stackoverflow) 1986-08-19 1986-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12554686U JPS6332678U (enrdf_load_stackoverflow) 1986-08-19 1986-08-19

Publications (1)

Publication Number Publication Date
JPS6332678U true JPS6332678U (enrdf_load_stackoverflow) 1988-03-02

Family

ID=31018536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12554686U Pending JPS6332678U (enrdf_load_stackoverflow) 1986-08-19 1986-08-19

Country Status (1)

Country Link
JP (1) JPS6332678U (enrdf_load_stackoverflow)

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