JPS63185225U - - Google Patents

Info

Publication number
JPS63185225U
JPS63185225U JP7574687U JP7574687U JPS63185225U JP S63185225 U JPS63185225 U JP S63185225U JP 7574687 U JP7574687 U JP 7574687U JP 7574687 U JP7574687 U JP 7574687U JP S63185225 U JPS63185225 U JP S63185225U
Authority
JP
Japan
Prior art keywords
nozzle
chemical liquid
central
center
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7574687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7574687U priority Critical patent/JPS63185225U/ja
Publication of JPS63185225U publication Critical patent/JPS63185225U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Coating Apparatus (AREA)
JP7574687U 1987-05-19 1987-05-19 Pending JPS63185225U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7574687U JPS63185225U (enrdf_load_stackoverflow) 1987-05-19 1987-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7574687U JPS63185225U (enrdf_load_stackoverflow) 1987-05-19 1987-05-19

Publications (1)

Publication Number Publication Date
JPS63185225U true JPS63185225U (enrdf_load_stackoverflow) 1988-11-29

Family

ID=30922177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7574687U Pending JPS63185225U (enrdf_load_stackoverflow) 1987-05-19 1987-05-19

Country Status (1)

Country Link
JP (1) JPS63185225U (enrdf_load_stackoverflow)

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