JPS6332446U - - Google Patents
Info
- Publication number
- JPS6332446U JPS6332446U JP12538086U JP12538086U JPS6332446U JP S6332446 U JPS6332446 U JP S6332446U JP 12538086 U JP12538086 U JP 12538086U JP 12538086 U JP12538086 U JP 12538086U JP S6332446 U JPS6332446 U JP S6332446U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- ion
- semiconductor wafer
- implanted
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538086U JPH0449815Y2 (sk) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538086U JPH0449815Y2 (sk) | 1986-08-15 | 1986-08-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6332446U true JPS6332446U (sk) | 1988-03-02 |
| JPH0449815Y2 JPH0449815Y2 (sk) | 1992-11-24 |
Family
ID=31018233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12538086U Expired JPH0449815Y2 (sk) | 1986-08-15 | 1986-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449815Y2 (sk) |
-
1986
- 1986-08-15 JP JP12538086U patent/JPH0449815Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449815Y2 (sk) | 1992-11-24 |