JPH01137527U - - Google Patents
Info
- Publication number
- JPH01137527U JPH01137527U JP3509388U JP3509388U JPH01137527U JP H01137527 U JPH01137527 U JP H01137527U JP 3509388 U JP3509388 U JP 3509388U JP 3509388 U JP3509388 U JP 3509388U JP H01137527 U JPH01137527 U JP H01137527U
- Authority
- JP
- Japan
- Prior art keywords
- planetary
- vacuum evaporation
- holder part
- evaporation apparatus
- dome
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988035093U JPH0635466Y2 (ja) | 1988-03-15 | 1988-03-15 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988035093U JPH0635466Y2 (ja) | 1988-03-15 | 1988-03-15 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01137527U true JPH01137527U (sk) | 1989-09-20 |
| JPH0635466Y2 JPH0635466Y2 (ja) | 1994-09-14 |
Family
ID=31261750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988035093U Expired - Lifetime JPH0635466Y2 (ja) | 1988-03-15 | 1988-03-15 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635466Y2 (sk) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005108638A1 (ja) * | 2004-05-11 | 2005-11-17 | Showa Shinku Co., Ltd. | 基板ドーム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224777A (ja) * | 1984-04-23 | 1985-11-09 | Sumitomo Electric Ind Ltd | 真空容器用治具 |
-
1988
- 1988-03-15 JP JP1988035093U patent/JPH0635466Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224777A (ja) * | 1984-04-23 | 1985-11-09 | Sumitomo Electric Ind Ltd | 真空容器用治具 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005108638A1 (ja) * | 2004-05-11 | 2005-11-17 | Showa Shinku Co., Ltd. | 基板ドーム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635466Y2 (ja) | 1994-09-14 |