JPS6332131Y2 - - Google Patents

Info

Publication number

JPS6332131Y2

JPS6332131Y2 JP18597583U JP18597583U JPS6332131Y2 JP S6332131 Y2 JPS6332131 Y2 JP S6332131Y2 JP 18597583 U JP18597583 U JP 18597583U JP 18597583 U JP18597583 U JP 18597583U JP S6332131 Y2 JPS6332131 Y2 JP S6332131Y2

Authority

JP

Japan

Prior art keywords

vapor deposition

melting

lithium

boat

coil

Prior art date

1983-12-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000463 material Substances 0.000 claims description 51
• 238000002844 melting Methods 0.000 claims description 39
• 230000008018 melting Effects 0.000 claims description 37
• 238000007740 vapor deposition Methods 0.000 claims description 26
• WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 22
• 229910052744 lithium Inorganic materials 0.000 description 22
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 12
• 229910052721 tungsten Inorganic materials 0.000 description 12
• 239000010937 tungsten Substances 0.000 description 12
• 230000008020 evaporation Effects 0.000 description 6
• 238000001704 evaporation Methods 0.000 description 6
• 229910052751 metal Inorganic materials 0.000 description 5
• 239000002184 metal Substances 0.000 description 5
• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• 229910052750 molybdenum Inorganic materials 0.000 description 3
• 239000011733 molybdenum Substances 0.000 description 3
• 229910052715 tantalum Inorganic materials 0.000 description 3
• GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
• 230000008021 deposition Effects 0.000 description 2
• 230000009191 jumping Effects 0.000 description 2
• 239000000155 melt Substances 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• 230000003647 oxidation Effects 0.000 description 2
• 238000007254 oxidation reaction Methods 0.000 description 2
• DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
• FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
• 229910052783 alkali metal Inorganic materials 0.000 description 1
• 150000001340 alkali metals Chemical class 0.000 description 1
• 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
• 150000001342 alkaline earth metals Chemical class 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• -1 lithium and sodium Chemical class 0.000 description 1
• 229910052749 magnesium Inorganic materials 0.000 description 1
• 239000011777 magnesium Substances 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1
• 229910052708 sodium Inorganic materials 0.000 description 1
• 239000011734 sodium Substances 0.000 description 1
• 150000003657 tungsten Chemical class 0.000 description 1
• 238000004804 winding Methods 0.000 description 1